Bronkhorst®
Vapor Delivery Module
9.17.079
22
6
Troubleshooting and service
6.1
Troubleshooting
Symptom
Possible cause
Action
No heating of heater, everything else works
(no ready heater LED after 10 minutes)
1. Mains switch turned off
Turn on mains switch
2. Fuse may be blown
Replace fuse
(check mains and heater fuse)
3. Defective temperature sensor
Return equipment
4. Heater defective
Return equipment
No heating of tracing, everything else works
(no ready heater LED after 30 minutes)
1. Fuse blown
Replace fuse
(check mains and tracing fuse)
2. Defective temperature sensor
Replace sensor
3. Defective tracing
Replace tracing
4. Inadequate insulation resulting
in thermal power loss
Improve insulation
No Liquid flow
1. Wrong controller mode LFC
Check controller mode LFC
2. No setpoint
Give Setpoint
No Gas flow
1. Wrong controller mode MFC
Check controller mode MFC
2. No Setpoint
Give Setpoint
No vapor stream
1. No gas supply
Check gas supply
2. No liquid supply
Check liquid supply
Liquid in process chamber
1. Mixture saturated, condensation
1. Increase setpoint Heater
2. Increase setpoint Tracing
3. Increase carrier gas flow
4. Decrease liquid flow
5. Any combinations of the
actions 1 – 4
2. No proper insulation of the
outlet piping
Improve insulation of piping
Irregular vapor stream
Significant pressure variations
on inlets
Reduce pressure variations by e.g.
adding pressure regulators or buffers
In case of not functioning equipment: De-installation and returning of the equipment is recommended. See
for the
relevant details.
Do not open or disassemble the equipment.