Bronkhorst®
Vapor Delivery Module
15
9.17.079
4.6.2
Startup with using vacuum
4.6.2.1 To fill the system
Procedure:
Actions:
A1
Evacuate the lines “Vacuum”
Start pumps
A2
Evacuate all lines
Close: V1, V2, V3, V4, and V6
Make sure that “waste” and “process” are vacuum
Connect inert gas on carrier gas inle.
Open : V5 and V8
Give setpoint to gas and liquid control (the control valves
of the LFC and MFC open)
Pump for a long time
Remark: if the system is not completely dry follow
procedure of E3, E4, (E5)
A3
Purge line between inert gas source and valve V1
Open valve V1 briefly for some seconds.
A4
Purge line between process gas source and gas MFC
Give setpoint = 0 to LFM (mix valve closes)
Open valve V3 briefly for some seconds
A5
Pump down liquid supply
Open V2 for some time
Close V2
A6
Setup carrier gas
Close V8
Open V3
A7
Fill the system with liquid
Close V1
Open B2 briefly; allow mixing valve VDM to fill
Close V5
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
A8
Optional: degassing mixing valve
Open V5, a needle valve will be best, to avoid too much
liquid be pumped away
A9
The system is now ready for use
4.6.2.2 To start the process
Procedure:
Actions:
B1
Set the heater at right temperature
Give setpoint to the heater, wait until temperature is
reached
B2
Start gas flow
Give setpoint to MFC
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
B3
Start liquid flow
Give setpoint LFC, wait until stabilization
Close supply pressure of the liquid vessel during the process.
The pressure controller of the inert gas supply can influence
the stability of the liquid flow controller.
B4
Connect process
Open V7, close V6
