MASS-STREAM
TM
Manual Flow Switch D-6300/FS
9.17.114A – edition: 2017-07
Page 28 of 36
3.3 Calibration and Look-up Table
The calibration is processed with a mass flow controller which functions as a reference.
The controller and the gas inlet pressure forward a defined gas flow, thus a raw signal of
the sensor can be allocated to each specific mass flow. To generate and store the look-up
table in the instrument up to 21 measurement points are recorded and equally arranged
over the total measurement range. Using the look-up table the instrument’s firmware
relates the correct gas flow to each raw signal via interpolation. This method allows
processing almost any sensor raw signal, given that the signal is monotonically
increasing.
Design of a Look-up Table
Index
Raw signal X
Standardized value Y
0
X
0
Y
0
1
X
1
Y
1
2
X
2
Y
2
3
X
3
Y
3
4
X
4
Y
4
…
…
…
20
X
20
Y
20
