STP-H803/H1303 Series Instruction Manual
11.3.3 Other
Abnormalities
(When the "FAILURE" lamp lights and the LCD displays an error message, see
Section 11.2, "When Error Message is Displayed on LCD.")
Table 11.4 Troubleshooting While the STP Pump Is Rotating
No. Symptom
Probable
causes
Countermeasures
Referred
Section
1 Insufficient
ultimate
pressure
Failure of the backing pump Check the capacity and
starting state (use a backing
pump having more capacity
that we specified).
4.3.4
13.1
Leakage of the piping system Check the piping system for
leakage.
4.3.4
Residual molecules
If the main composition is H
2
or H
2
O, perform baking; if it
is other gases, clean the
inside of the vacuum
equipment
(If gases remain inside the
STP pump, contact Service
office when it is needed to be
cleaned).
5.3
11.8.3
2 The STP pump
stops.
ROTATION INHIBIT signal
input pins (REMOTE X7
(1)-(5)) are opened.
When not using this
function, short the circuit
between (1)-(5), or set
"Inhibit Command" to
"DISABLE".
If these pins are opened, the
STP pump will not rotate
after performing start
operation.
8.1
9.3
3 The TMS unit
does not
function
Incorrect settings of TMS
function
When using the TMS unit,
set "TMS Function" to
"ENABLE".
9.3
4 ROTATION
INHIBIT signal
does not
function
correctly.
Incorrect settings of Inhibit
function
When using the ROTATION
INHIBIT signal, set "Inhibit
Command" to "ENABLE".
9.3
5 The E. V. valve
does not
function (The
E.V. valve is not
used with this
series of the
STP pump).
Incorrect settings of the E. V.
valve function
When using the E. V. valve,
set "emergency vent. Valve
function" to "ENABLE".
Troubleshooting
11-9
