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34
Chapter 6. Specifications
External dimensions
The engineering drawings below show the CMS_ _ _ _B with left-to-
right flow direction.
The CMS_ _ _ _R with right-to-left flow direction has the same
dimensions.
z
SUS model CMS9500/0002/0005/0020/0050B
Unit: mm
z
SUS model CMS0200B
Unit: mm
M4 threaded holes (2), 5 mm deep (for retaining screws)
X10L
L/min
EV2
EV1
ENT
MODE
DISP
Mass Flow Meter
MADE IN JAPAN
Azbil Corporation
37
32
17
15.7
15.7
91
69.1
(7.5)
(48.7)
18.5
(58)
(75)
(48)
(58)
(4.5)
21.5
7.5
*Optional part (sold separately)
Harness with dedicated connector:
model No. 81446594-ITEM
Mounting bracket:
model No. 81446721-001
Connector*: DF11-10DP-2DS,
made by Hirose Electric Co., Ltd.
Connection threads
: Rc 1/4 (2)
Harness with dedicated
connector
Mounting bracket
48 0.3
15
0.3
X10L
L/min
EV2
EV1
ENT
MODE
DISP
Mass Flow Meter
Azbil Corporation
MADE IN JAPAN
Connection thread:
Rc 1/2 (2)
(90)
(78)
(75)
(63)
(4.5)
98.6
18.7
18.7
82.1
23.2
45
(62)
50
Connector*: DF11-10DP-2DS,
made by Hirose Electric Co., Ltd.
(7.5)
25.3
13.5
M4 threaded holes (4), 6 mm deep (for retaining screws)
*Optional part (sold separately)
Harness with dedicated connector:
model No. 81446594-ITEM
Mounting bracket:
model No. 81446721-001
48 0.3
27
0.3
Harness with dedicated
connector
Mounting
bracket
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