Azbil Micro Flow CMS 0200, Руководство пользователя

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3
Chapter 1. Overview
z
SUS 316 model
Basic
model
No.
Flow
rate
range
Model
Gas-con-
tacting
material
Con-
nection
method
Gas
type
Out-
put
Op-
tion 1
Op-
tion 2
Op-
tion 3
Op-
tion 4
Ap-
pend-
ed No.
Description
CMS Gas mass flow meter
9500 0–500 mL/min (standard)*
1
*
4
0002 0–2 L/min (standard)* 1 * 4
0005 0–5 L/min (standard)*
1
*
4
0020 0–20 L/min (standard)*
1
*
4
0050 0–50 L/min (standard)*
1
*
4
0200 0–200 L/min (standard)* 1 * 4
0500 0–500 L/min (standard)*
1
*
4
B With display (flow direction: left to right)
R With display (flow direction: right to left)
T SUS316
U
UNF connection, CMS0200/0500: 3/4-16 UNF
CMS9500/0002/0005/0020/0050: 9/16-18 UNF
T
Rc connection,
CMS0200/0500: Rc 1/2,
CMS9500/0002/0005/0020/0050: Rc 1/4
S
Swagelok connection,
CMS0200/0500: 1/2 Swagelok
CMS9500/0002/0005/0020/0050: 1/4 Swagelok
V
VCR connection,
CMS0200/0500: 1/2 VCR
CMS9500/0002/0005/0020/0050: 1/4 VCR
N Air/nitrogen*
2
S Oxygen* 3 * 5
2 Analog output: 0–5 V DC / 1–5 V DC / 4–20 mA
0 No optional functions
1 With RS-485 communications
0 No optional functions
0 No degreasing
1 Degreasing for gas-contacting parts*
5
0 No optional functions
D With inspection report
Y With traceability certificate
0 Product version
*1. mL/m in (standard) and L/min (standard) indicate the volumetric flow rate per minute converted to conditions of 20 °C and
101.325 kPa (1 atm).
The reference temperature can be changed in a range from 0 to 35 °C (in 1 °C increments).
*2. The model is set for air/nitrogen use before shipment.
The gas type can be changed to argon, carbon dioxide (CO
2
), fuel gas 13A (LNG, either 45 or 46 MJ/m3), 100 % propane, 100 %
methane, or 100 % butane.
*3. The model is set for oxygen use before shipment.
The gas type can be changed to air/nitrogen, argon, carbon dioxide (CO
2
), fuel gas 13A (LNG, either 45 or 46 MJ/m3), 100 %
propane, 100 % methane, or 100 % butane.
Never change the setting back to oxygen if the CMS has been used even once for any other gas.
*4. The flow rate ranges shown in the above table are for air.
The measurable flow rate range varies depending on the gas type.
For details, see Maximum measurable flow rate and output voltage for various gas types (P. 32).
*5. If oxygen is selected as the gas type, “1” (degreasing for gas-contacting parts) must be selected for option 3.