Anest Iwata ISP-1000, Инструкция по эксплуатации

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-18-
CAUTION
Danger of exhaust disruption
Remove blank flange from inlet and outlet.
Operation with blank flange being fitted can disrupt exhaust or cause blank flange to fly
by exhaust impetus, resulting in accident, failure, or bodily injury from contact with flying
objects.
Remove blank
flange
Danger of vacuum break and pollution
Be sure to close isolation valve between vacuum pump and vacuum system
(chamber) during start-up and stop.
Start-up or stop with isolation valve in the open position can draw back gas and debris
attached to inside of vacuum pump to vacuum chamber due to pressure differential,
resulting in vacuum break and pollution on vacuum chamber side.
Start or stop after
closing isolation
valve
Danger of abnormal sound and failure
Open inlet to atmosphere for about 5 seconds before restarting vacuum pump.
If not, it can unbalance temperature inside vacuum pump, resulting in failure.
O p e n a i r i n l e t
Danger of exceeding permissible temperature of intake gas
If intake gas temperature is over 50
℃ ℃ ℃ ℃
, be sure to install a chiller or trap
between vacuum pump and vacuum chamber so that gas intake temperature of
vacuum pump keeps below 50
℃ ℃ ℃ ℃
.
If not, vacuum pump temperature can increase, resulting in failure.
B e w a r e
t e m p e r a t u r e o f
i n t a k e g a s
Danger of remaining moisture
When evacuating moisture, be sure to open air-flush port (air-flush operation).
If you evacuate vapor while air-flush port is closed, condensed water will remain inside
vacuum pump and cause failure.
Operate while
opening air-flush
port
Danger of insufficient vapor exhaust
After evacuating vapor, do air-flush operation for at least one hour.
If you close air-flush port or stop vacuum pump soon after evacuating vapor, condensed
moisture will remain inside vacuum pump, which will cause failure.
Caution after
exhausting vapor
Danger of exceeding permissible intake gas volume
When sending
N
2
gas or dry air into air-flush port, pressure should be the same
as atmospheric pressure and flow rate should be less than 10NL/min.
If not, it can increase pressure inside vacuum pump, resulting in failure.
Beware of intake
gas volume
Important
If it takes time to reach ultimate pressure of pump during initial operation (also operation
after pump has not been used for a long time),
Close inlet, and continue operation for 6
～
8 hours while opening inlet for 3
～
5 seconds to atmosphere 2
～
3
times per hour. During pump stoppage, moisture might have entered inside of pump and deteriorated
performance to reach ultimate pressure.
If pump has evacuated liquid such as water or high humid air (over 60%RH),
Moisture can deposit inside pump and cause pump failure. In that case, close isolation valve, and open inlet to
atmosphere for 3
～
5 seconds several times and exhaust moisture inside pump to outside.
If pump has continued operation around ultimate pressure or continuously evacuated high
humid gas
Moisture can be condensed and remains inside pump, causing insufficient ultimate pressure and failure.
In that case, do air-flush operation in accordance with 4.2 [page 18].