Installation conditions
22
Edition 05/2014
PlasmaQuant PQ 9000
4.4
Exhaust unit
CAUTION! Switch on the exhaust unit during device operation!
Switch on the exhaust unit prior to igniting the plasma.
Direct the waste air into the atmosphere and avoid blockages!
Correct exhaustion requires the connection of an extraction hose to the PlasmaQuant PQ 9000
smokestack.
The exhaust unit is meant to remove hazardous gases generated during plasma operation,
such as ozone or nitrous gases. Use an exhaust unit made of heat and corrosion-resistant
material. The first 6 m of the exhaust unit should be made of metal.
Parameters
Properties
Material
Heat and corrosion resistant (recommended: V2A steel)
External pipe diameter
∅
125 mm
Extraction output
Min. 3.5 m
3
/min, max. 5.5 m
3
/min (at best 4.5 to 5 m
3
/min)
Adapter using flexible aluminum pipe
Internal pipe diameter
∅
125 mm
Length: approx. 1000 mm
Summary 4 Exhaust unit requirements
4.5
Recirculating chiller
The HF generator is cooled by a cooling circuit of the external recirculating chiller. Please
observe the information provided in the recirculating chiller operating instructions.
The system must be filled with a coolant which is composed of distilled/deionized water with a
corrosion inhibitor and a biocide The preparation of the coolant is described in the section
"Maintenance of the recirculating chiller" p. 61.
Parameters
Properties
Length of water tubing
2.0 m
Length of mains cable
2.7 m
Water rate
1.0 – 1.8 L/s
Cooling water temperature range at device cooling
water inlet
17 – 24°C
Cooler target temperature
18°C
Cooling performance
3 000 W
Pressure setting
3.7 bar (53 Psi)
Summary 5 Cooling circuit requirements
