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Agilent Technologies TPS-mini 9699181, Руководство пользователя

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16  Instructions for Use

 

Safety Guideline for Turbomolecular Pumps

 

 

252/318 

TPS-mini User Manual / 87-901-003-01 (E) 

Safety Guideline for Turbomolecular Pumps 

Turbomolecular pumps as described in the following operating 
manual contain a large amount of kinetic energy due to the high 
rotational speed in combination with the specific mass of their 
rotors. 

In case of a malfunction of the system for example rotor/stator 
contact or even a rotor crash the rotational energy may be released. 

 

WARNING! 

 

 

To avoid damage to equipment and to prevent injuries to operating personnel 
the installation instructions as given in this manual should be strictly 
followed! 

 

Содержание TPS-mini 9699181

Страница 1: ...dienungshandbuch Ohjek sikirja Notice de mode d emploi Felhaszn l i k zik nyv Manual de istrucciones Podrecznik instrukcji Manual de istru es N vod k pou it Bedrijfshandleiding N vod na obsluhu Istruk...

Страница 2: ...furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contr...

Страница 3: ...TPS mini TPS mini User Manual 87 901 003 01 E 3 318 TPS mini...

Страница 4: ...olecular Pumps 252 General Information 253 Symbols used 255 Storage 256 Preparation for installation 256 Installation 257 Use 261 Switching on and Use of TPS mini 262 TPS mini Switching off 263 Emerge...

Страница 5: ...ntain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or...

Страница 6: ...ecular pump for high and ultra high vacuum applications associated with its relevant controller and its primary pump The system can pump any type of gas or gas compound It is not suitable for pumping...

Страница 7: ...rning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are disp...

Страница 8: ...anger of burns if hot parts are touched On Power Caution risk of electric shock Off Power WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required pr...

Страница 9: ...operated for the first time by the customer the shelf life of a turbomolecular pump is 12 months from the shipping date CAUTION If for any reason the shelf life time is exceeded the pump has to be re...

Страница 10: ...exposed to vacuum Always use gloves or other appropriate protection Figure 1 NOTE Normal exposure to the environment cannot damage the TPS mini Nevertheless it is advisable to keep it closed until it...

Страница 11: ...lative humidity refer to the manuals of the single TPS components In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for...

Страница 12: ...ropriate Agilent hardware See the appendix Technical Information for a detailed description NOTE The TPS mini cannot be fixed by means of its base For installation of optional accessories see Technica...

Страница 13: ...16 Instructions for Use Installation 260 318 TPS mini User Manual 87 901 003 01 E CAUTION Assure a free space all around the system at minimum of 20 cm to allow proper air circulation...

Страница 14: ...nge must not exceed 120 C with ConFlat flanging and 80 C with ISO flanging WARNING Never use the turbopump when the inlet flange is not connected to the vacuum chamber or is not blanked WARNING Do not...

Страница 15: ...ot use the pump in presence of explosive gases Switching on and Use of TPS mini To switch on the TPS mini it is sufficient to supply the mains and then move the external switch to ON position red ligh...

Страница 16: ...n Waiting for interlock status fast flashing period of about 200 ms error condition See the appendix Technical Information for a detailed description of the TPS mini control panel TPS mini Switching o...

Страница 17: ...and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center NOTE Before returning the system to the constructor for repairs t...

Страница 18: ...n Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end us...

Страница 19: ...16 Instructions for Use Disposal 266 318 TPS mini User Manual 87 901 003 01 E...

Страница 20: ...n 271 Control Panel Description 271 Technical Specification273 TPS mini Outline 275 Inlet Screen Installation 278 High Vacuum Flange Connection 280 High Vacuum Flange Connection Configurations 282 Int...

Страница 21: ...er 294 How to Connect the Outputs of the Controller 296 J2 Serial 297 RS 232 RS 485 Communication Description 298 Communication Format298 Serial Communication Descriptions 300 Window Protocol 300 Desc...

Страница 22: ...any bladed stages and Twistorr drag stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength light aluminium alloy and...

Страница 23: ...To reduce losses during start up to a minimum the frequency increases according to a ramp with a higher initial voltage frequency ratio A thermistor sensor is mounted near the upper bearing to preven...

Страница 24: ...ia the serial connection Diaphragm Forepump Description The pump consists of an electric DC motor driving an eccentric which moves an elastic diaphragm The pump has four heads The compression chamber...

Страница 25: ...S 485 connection STATUS Blue LED to show the system operating condition P1 VENT Connector to control the optional vent valve J5 GAUGE Connector to control external EyeSys Gauge ON OFF red switch with...

Страница 26: ...inutes Operating position any Operating ambient temperature 5 C to 35 C Bakeout temperature 120 C at inlet flange max CF flange 80 C at inlet flange max ISO flange Noise level 56 4 dB A at 1 meter Lub...

Страница 27: ...ge temperature 20 C to 70 C Weight kg lbs KF 7 9 kg 17 4 lbs ISO 7 5 kg 16 5 lbs CFF 8 8 kg 19 4 lbs According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hou...

Страница 28: ...Technical Information TPS mini Outline 17 TPS mini User Manual 87 901 003 01 E 275 318 TPS mini Outline The following figure shows the TPS mini outline Figure 5...

Страница 29: ...17 Technical Information TPS mini Outline 276 318 TPS mini User Manual 87 901 003 01 E Figure 6 Graph of pumping speed vs inlet pressure N2...

Страница 30: ...Technical Information TPS mini Outline 17 TPS mini User Manual 87 901 003 01 E 277 318 Figure 7 Graph of pressure vs time with a pump down volume of 1 litre...

Страница 31: ...Installation Figure 8 The inlet screens mod 9699300 and 9699309 prevent the blades of the pump from being damaged by dust greater than 0 7 mm diameter The inlet screen however does reduce the pumping...

Страница 32: ...reen can be mounted on either pump series and is supplied with a small tab for easy removal see figure Figure 10 The following figure shows the overall flange dimensions with the protection screen fit...

Страница 33: ...i User Manual 87 901 003 01 E High Vacuum Flange Connection To connect the Turbo pump to the ISO inlet flange remove the outer ring and position the centering ring as shown in the figure Figure 12 The...

Страница 34: ...apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Note that the 2 75 CF flange has six blind holes Attach the units and tig...

Страница 35: ...17 Technical Information High Vacuum Flange Connection Configurations 282 318 TPS mini User Manual 87 901 003 01 E High Vacuum Flange Connection Configurations Figure 14...

Страница 36: ...nections Input Power Connector The following figure shows the input power connector Figure 15 P1 Vent Figure 16 Vent Connector This is a dedicated 24 Vdc connector to control the optional vent valve a...

Страница 37: ...J5 Gauge Connector TPS mini is equipped with new generation gauge reading card able to drive read a Agilent Pressure data is available on three independent reading channels 1 On board display data ex...

Страница 38: ...operation Figure 18 Gauge Connector NOTE The FRG700 gauge is intended for high vacuum use so with pressure above 50 mTorr the signal is misinterpreted and a false pressure is displayed Use a transiti...

Страница 39: ...re it has showed the right procedure to connect a cable to the I O or to the serial port A shieleed cable of 30 m to be checked with Riccardo the max length maximum length has to be utilized for both...

Страница 40: ...mation P1 Vent 17 TPS mini User Manual 87 901 003 01 E 287 318 In this way you will be sure to reduce the influence of the external noise and to accomplish the EMC requests In picture d is showed the...

Страница 41: ...vailable signals are detailed in the table the following paragraphs describe the signal characteristics and use Tab 4 PIN N SIGNAL NAME INPUT OUTPUT 1 START STOP IN 2 START STOP IN 3 INTERLOCK IN 4 IN...

Страница 42: ...to the GROUND pin this is the default configuration of the cover connector INTERLOCK input signal to control the pump rotation With the supplied cover connector the INTERLOCK signal is connected to t...

Страница 43: ...3 01 E Figure 22 PROGRAMMABLE ANALOG SIGNAL this output signal is a voltage from 0 to 10 Vdc proportional to a reference quantity frequency or power or Temperature or Pressure set by the user The defa...

Страница 44: ...nual 87 901 003 01 E 291 318 Figure 24 Figure 25 Output Power setting 0 10 20 30 40 50 60 70 80 90 100 0 1 2 3 4 5 6 7 8 9 10 Voltage V Power W Output Temperature setting 0 10 20 30 40 50 60 70 80 90...

Страница 45: ...be high level active that is the output is normally OFF and becomes ON when activated or low level active that is the output is normally ON and becomes OFF when activated Moreover if the reference qua...

Страница 46: ...set point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings reference quantity frequency thereshold 867 Hz hysteresis 2 activation type high l...

Страница 47: ...ere below there are the typical connections of the open collector input of TPS mini to an external system Two cases are considered 1 the customer supplies the 24 Vdc 2 the customer does not supply the...

Страница 48: ...Technical Information J1 IN OUT 17 TPS mini User Manual 87 901 003 01 E 295 318 Figure 29 Case 2 with relay utilisation...

Страница 49: ...ation How to Connect the Outputs of the Controller The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a computer etc and the relate...

Страница 50: ...IN OUT 17 TPS mini User Manual 87 901 003 01 E 297 318 Figure 31 Typical output connection 1 J2 Serial Figure 32 This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485...

Страница 51: ...software is available optional RS 232 RS 485 Communication Description Both the RS 232 and the RS 485 interfaces are available on the connector J2 The communication protocol is the same see the struct...

Страница 52: ...Technical Information RS 232 RS 485 Communication Description 17 TPS mini User Manual 87 901 003 01 E 299 318 Figure 33 RS 232 Connection Figure 34 RS 485 Connection...

Страница 53: ...Agilent cannot guarantee compliance with FCC regulations for radiated emissions unless all external wiring is shielded with the shield being terminated to the metal shround on the 0 subconnector The c...

Страница 54: ...a data is indicated between two quotes it means that the indicated data is the corresponding ASCII character STX Start of transmission 0x02 ADDR Unit address 0x80 for RS 232 ADDR Unit address 0x80 dev...

Страница 55: ...TX and including the ETX terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type Wh...

Страница 56: ...0x6 The command execution has been successfully completed NACK 1 byte 0x15 The command execution has been failed Unknown Window 1 byte 0x32 The specified window in the command is not a valid window Da...

Страница 57: ...tion Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80...

Страница 58: ...ontroller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02...

Страница 59: ...urce Controller with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Command READ SERIAL TYPE Source PC Destination Controller wit...

Страница 60: ...ration Remote 1 Serial 0 default 1 100 R W L Soft Start write only in Stop condition YES 1 NO 0 101 R W N R1 Set Point type 0 Frequency 1 Power 2 Time 3 Normal 4 Pressure default 0 102 R W N R1 Set Po...

Страница 61: ...Continuous 1 111 R W L Analog output type output voltage signal proportional to frequency or power 0 frequency 1 power default 1 2 Pump temperature 3 Pressure 117 R W N Low Speed frequency Hz 1100 to...

Страница 62: ...sure Reading Connection Factor Table A1 Appendix A FRG700 Manual 0 to 10 0 0 10 1 N2 162 R W A R1 Set Point Pressure Valve Valid if Win 101 4 Format X X E XX Where X 0 to 9 s or 163 R W N Pressure uni...

Страница 63: ...0 224 R A Pressure reading Format X X E XX 226 R N Rotation Frequency rpm 300 R N Cycle time in minutes zeroed by the reset command 0 to 999999 301 R N Cycle number zeroed by the reset command 0 to 99...

Страница 64: ...n the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or...

Страница 65: ...cable EU plug 3m 9699957 Serial cable and T Plus Software 9699883 DIY Full Range Gauge Kit 74 FS KF 40 9699190 DIY Full Range Gauge Kit 74 FS ISO 63 9699192 DIY Full Range Gauge Kit 74 FS CFF 4 5 969...

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