Aerotech MPS75SV, Руководство по оборудованию

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MPS75SV Hardware Manual Table of Contents
Table of Contents
MPS75SV Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.2. Basic Specifications 13
1.3. Vacuum Operation 14
Chapter 2: Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 16
2.3. Securing the Stage to the Mounting Surface 18
2.4. Attaching the Payload to the Stage 19
Chapter 3: Electrical Specifications and Installation 21
3.1. Motor and Feedback Connectors 22
3.2. Motor and Feedback Wiring 27
3.3. Motor and Feedback Specifications 29
3.4. Limits and Machine Direction 31
3.5. Motor and Feedback Phasing 32
Chapter 4: Maintenance 33
4.1. Service and Inspection Schedule 33
4.2. Cleaning and Lubrication 34
4.3. Troubleshooting 36
Appendix A: Warranty and Field Service 37
Appendix B: Revision History 39
Index 41
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