Aerotech MPS75SV, Руководство по оборудованию

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MPS75SV Hardware Manual Mechanical Specifications and Installation
2.4. Attaching the Payload to the Stage
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to
Electrical Specifications and Installation and the documentation
delivered with the stage.
N O T E : If your MPS75SV was purchased with Aerotech controls, it might have been tuned with a
representative payload based on the information provided at the time of order. If the MPS75SV is started
up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and
servo instability can occur. Refer to the controller help file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
N O T E : For valid system performance, the mounting interface should be flat within 5 µm.
W A R N I N G : Refer to the dimensions in Section 2.2. for maximum allowable thread
engagement. A screw extending through the stage table can affect travel and damage the
stage.
Refer to the dimension drawing in Section 2.2. for mounting hole locations and screw lengths.
Application loads should be symmetrically distributed whenever possible (i.e., the payload should be
centered on the stage table and the entire stage should be centered on the support structure). If cantilevered
loads are applied, refer to
Figure 2-4 to find the maximum allowable load.
Figure 2-4: Load Capability of MPS75SV Series Stages
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