Aerotech MPS75SV, Руководство по оборудованию

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Mechanical Specifications and Installation MPS75SV Hardware Manual
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The MPS75SV must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance from
the MPS75SV stage. When it is mounted to a non-flat surface, the stage can be distorted while the mounting
screws are tightened. This distortion will decrease overall accuracy. Adjustments to the mounting surface
must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 5 µm.
N O T E : The MPS75SV is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the MPS75SV. Shimming should be avoided if possible. If shimming is required, it
should be minimized to retain maximum rigidity of the system.
The dimension drawings in Section 2.2. include the mounting hole locations and screw lengths.
D A N G E R : To minimize the possibility of bodily injury or death, disconnect all electrical
power prior to performing any maintenance or making adjustments to the equipment.
W A R N I N G : An unsecured MPS75SV could be dragged off of a mounting surface by its
unsupported cable.
Figure 2-3: Mounting Hole Locations
18 Chapter 2 www.aerotech.com