Aerotech ARMS Series, Руководство по оборудованию

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Overview ARMS Hardware Manual
Table 1-4: ARMS200 Series Specifications
ARMS Series ARMS200-M1 ARMS200-M2
Width 196 mm
Height
(1)
224 mm 249 mm
Aperture
(2)
8 mm
Total Travel ±360° Continuous
Motor S-180-69-A S-180-94-A
Bus Voltage Up to 340 VDC
Maximum Torque (Continuous) 11.12 N·m 15.93 N·m
Fundamental Encoder Resolution 23,600 lines/rev
Accuracy (calibrated)
(3)
±2.5 arc·sec
Repeatability ±0.5 arc·sec
Max Load
(4)
Axial 140 kg
Moment 425 N·m
Tilt Error Motion ±1 arc·sec
Maximum Rate
(5)
1500°/s
Minimum Rate
(6)
0.002°/s
Rate Resolution
(6)
0.002°/s
Rate Stability
(6)
Over 360° 0.0001%
Over 10° 0.005%
Over 1° 0.05%
Peak Acceleration
(7)
>20,000°/s
2
Inertia (unloaded)
(7)
33,600 kg·mm
2
39,800 kg·mm
2
Total Mass
(7)
22 kg 26 kg
Servo Bandwidth
(8)
> 70 Hz (-3 dB)
Material Aluminum
Stage Finish Black Anodize
Tabletop Finish Hard Coating (62 Rockwell Hardness)
1. Height may vary with certain slip ring and rotary union options (refer to for more details).
2. Aperture not available with all slip ring and rotary union options (refer to
Table 1-1 for more details).
3. Certified with each stage. Requires the use of an Aerotech controller.
4. Maximum loads are mutually exclusive.
5. Maximum rate is based on stage capability. Actual rate may depend on encoder resolution, load, amplifier bus voltage, and motor
(refer to the S-series rotary motor (P/N: EDU166) for more information.
6. Minimum rate, rate resolution, and rate accuracy are based on stage capability. Actual rate, resolution, and accuracy may depend
on encoder resolution.
7. Peak acceleration, inertia, and total mass based on unloaded stage with standard diameter tabletop.
8. Servo bandwidth is based on unloaded stage with standard diameter tabletop. Actual bandwidth may depend on mass and inertia
of stage payload.
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