Aerotech ARMS Series, Руководство по оборудованию

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ARMS Hardware Manual Table of Contents
Table of Contents
ARMS Series Stage Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 10
1.2. Accuracy and Temperature Effects 10
1.3. Basic Specifications 11
1.4. Vacuum Operation 14
Chapter 2: Mechanical Specifications and Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 16
2.3. Securing the Stage to the Mounting Surface 25
2.4. Attaching the Payload to the Stage 27
Chapter 3: Electrical Specifications and Installation 29
3.1. Motor and Feedback Connectors 30
3.2. Motor and Feedback Wiring 32
3.3. Motor and Feedback Specifications 33
3.4. Marker and Machine Direction 37
3.5. Motor and Feedback Phasing 38
Chapter 4: Maintenance 41
4.1. Service and Inspection Schedule 41
4.2. Cleaning and Lubrication 41
4.3. Troubleshooting 42
Appendix A: Warranty and Field Service 43
Appendix B: Revision History 45
Index 47
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