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ARMS Hardware Manual

Index

Index

2010

Altitude

Ambient Temperature

Attaching the Payload

cleaning

mounting surface

solvents

Cleaning

Dimensions

Electrical Specifications

S-130

S-180

S-240

EN 60204-1

EN ISO 12100

Encoder Specifications

field service

Global Technical Support

Hall-Effect Sensors Specifications

Humidity

Inspection Schedule

label

lubrication

Lubrication

mounting surface

cleaning

securing stage

part number

Performance Specifications

S-130

S-180

S-240

Protection Rating

protective ground connection

S-130

Electrical Specifications

Performance Specifications

S-180

Electrical Specifications

Performance Specifications

S-240

Electrical Specifications

Performance Specifications

serial number

shimming

stabilizing stage

stage

distortion

stabilizing

www.aerotech.com

Index

Содержание ARMS Series

Страница 1: ...Revision 1 03 00 ARMS Series Stage Hardware Manual...

Страница 2: ...vice aerotech com 101 Zeta Drive Pittsburgh PA 15238 2811 www aerotech com United Kingdom Japan Phone 44 0 1256 855055 Fax 44 0 1256 855649 Email service aerotech co uk Phone 81 0 50 5830 6814 Fax 81...

Страница 3: ...ion 15 2 1 Unpacking and Handling the Stage 15 2 2 Dimensions 16 2 3 Securing the Stage to the Mounting Surface 25 2 4 Attaching the Payload to the Stage 27 Chapter 3 Electrical Specifications and Ins...

Страница 4: ...destal Dimensions for the ARMS200 HDP 21 Figure 2 7 ARMS260 Dimensions TT1 TT2 TT3 TT4 22 Figure 2 8 ARMS260 Dimensions TT5 TT6 TT7 TT8 23 Figure 2 9 Mounting Pedestal Dimensions for the ARMS260 HDP 2...

Страница 5: ...5 ARMS260 Series Specifications 13 Table 2 1 Stage to Mounting Surface Hardware 25 Table 3 1 Motor Wiring Connector 30 Table 3 2 Feedback Connector 31 Table 3 3 Feedback Specifications 33 Table 3 4 S...

Страница 6: ...the possibility of electrical shock bodily injury or death the following precautions must be followed 1 Moving parts can cause crushing or shearing injuries Access to all stage and motor parts must b...

Страница 7: ...er more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be...

Страница 8: ...Table of Contents ARMS Hardware Manual 8 www aerotech com This page intentionally left blank...

Страница 9: ...and ARMS200 only SR02 1 24 lines 2A max current SR03 1 3 36 lines 2A max current ARMS200 only SR04 1 48 lines 2A max current ARMS260 only SR05 1 3 56 lines 2A max current ARMS200 only SR06 1 72 lines...

Страница 10: ...otech if your specific application involves use above 2 000 m or below sea level Vibration Use the system in a low vibration environment Excessive floor or acoustical vibration can affect system perfo...

Страница 11: ...000 s2 Inertia unloaded 7 6 600 kg mm2 9 700 kg mm2 Total Mass 7 9 kg 15 kg Servo Bandwidth 8 70 Hz 3 dB Material Aluminum Stage Finish Black Anodize Tabletop Finish Hard Coating 62 Rockwell Hardness...

Страница 12: ...Tabletop Finish Hard Coating 62 Rockwell Hardness 1 Height may vary with certain slip ring and rotary union options refer to for more details 2 Aperture not available with allslip ring and rotary uni...

Страница 13: ...e Tabletop Finish Hard Coating 62 Rockwell Hardness 1 Height may vary with certain slip ring and rotary union options refer to for more details 2 Aperture not available with allslip ring and rotary un...

Страница 14: ...Overview ARMS Hardware Manual 1 4 Vacuum Operation Contact the factory for information regarding operation in a vacuum environment 14 Chapter 1 www aerotech com...

Страница 15: ...ffect the performance of the ARMS Use care when moving the ARMS Carefully remove the ARMS from its protective shipping container Gently set the ARMS on a smooth flat and clean surface Before operating...

Страница 16: ...Installation ARMS Hardware Manual 2 2 Dimensions Figure 2 1 ARMS150 Dimensions TT1 TT2 TT3 TT4 16 Chapter 2 www aerotech com...

Страница 17: ...ARMS Hardware Manual Installation Figure 2 2 ARMS150 Dimensions TT5 TT6 TT7 TT8 www aerotech com Chapter 2 17...

Страница 18: ...Installation ARMS Hardware Manual Figure 2 3 Mounting Pedestal Dimensions for the ARMS150 HDP 18 Chapter 2 www aerotech com...

Страница 19: ...ARMS Hardware Manual Installation Figure 2 4 ARMS200 Dimensions TT1 TT2 TT3 TT4 www aerotech com Chapter 2 19...

Страница 20: ...Installation ARMS Hardware Manual Figure 2 5 ARMS200 Dimensions TT5 TT6 TT7 TT8 20 Chapter 2 www aerotech com...

Страница 21: ...ARMS Hardware Manual Installation Figure 2 6 Mounting Pedestal Dimensions for the ARMS200 HDP www aerotech com Chapter 2 21...

Страница 22: ...Installation ARMS Hardware Manual Figure 2 7 ARMS260 Dimensions TT1 TT2 TT3 TT4 22 Chapter 2 www aerotech com...

Страница 23: ...ARMS Hardware Manual Installation Figure 2 8 ARMS260 Dimensions TT5 TT6 TT7 TT8 www aerotech com Chapter 2 23...

Страница 24: ...Installation ARMS Hardware Manual Figure 2 9 Mounting Pedestal Dimensions for the ARMS260 HDP 24 Chapter 2 www aerotech com...

Страница 25: ...factory If machining is required to achieve the desired flatness it should be performed on the mounting surface rather than the ARMS Shimming should be avoided if possible If shimming is required it...

Страница 26: ...ation ARMS Hardware Manual Counterbored Mounting Holes QTY 4 Side Mount Holes QTY 4 per side on 3 sides Figure 2 10 Standard Mounting Holes Figure 2 11 Side Mount Mounting Holes 26 Chapter 2 www aerot...

Страница 27: ...vo instability can occur Refer to the controller help file for tuning assistance The payload must be flat rigid and comparable to the stage in quality to maintain optimum performance N OTE For valid s...

Страница 28: ...Installation ARMS Hardware Manual Figure 2 13 ARMS Cantilevered Load Capability 28 Chapter 2 www aerotech com...

Страница 29: ...e appropriate connections If system level integration was purchased an electrical drawing showing system interconnects has been supplied with the system separate from this documentation The electrical...

Страница 30: ...safety and compliance requirements necessary for the integration of this stage into the final application W A R N I N G The protective ground connection must be properly installed to minimize the poss...

Страница 31: ...6 Marker N 7 Marker 8 Reserved 9 Reserved 10 Hall Effect sensor phase A 11 Hall Effect sensor phase C 12 Reserved 13 Reserved 14 Cosine 15 Cosine N 16 5 V power supply 17 Sine 18 Sine N 19 Reserved 2...

Страница 32: ...ting Specifications ARMS Hardware Manual 3 2 Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 Motor and Feedback Wiring 32 Chapter 3 www aerotec...

Страница 33: ...V max pull up Output Current 5 mA sinking Thermistor Specifications Polarity Logic 0 no fault Logic 1 over temperature fault Cold Resistance 100 Hot Resistance 10 K Note 1K pull up to 5V recommended...

Страница 34: ...ce C W 0 95 0 64 Number of Poles 18 18 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 75 C rise above a 25 C ambient temperatu...

Страница 35: ...stance C W 0 67 0 57 Number of Poles 18 18 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 75 C rise above a 25 C ambient tempe...

Страница 36: ...ent temperature 2 Values shown 75 C rise above a 25 C ambient temperature with housed motor mounted to a 330 mm x 330 mm x 13 mm aluminum heat sink 3 Peak force assumes correct rms current consult Aer...

Страница 37: ...hasing of the feedback and motor signals and is dictated by the stage wiring refer to Section 3 5 for Motor and Feedback phasing information Programming direction of a stage is set by the controller t...

Страница 38: ...erating Specifications ARMS Hardware Manual 3 5 Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 3 Hall Phasing 38 Chapter 3 www aerotech co...

Страница 39: ...ARMS Hardware Manual Operating Specifications Figure 3 4 Analog Encoder Phasing Reference Diagram www aerotech com Chapter 3 39...

Страница 40: ...Operating Specifications ARMS Hardware Manual 40 Chapter 3 www aerotech com This page intentionally left blank...

Страница 41: ...ect and perform an operational check on all safeguards and protective devices In general repair and or replacement of damaged or malfunctioning components by Aerotech field service personnel is not po...

Страница 42: ...lt See controller documentation Stage moves uncontrollably Encoder sine and cosine signals connections See Chapter 3 and Controller documentation Motor Connections See Chapter 3 and Controller documen...

Страница 43: ...ch approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate requ...

Страница 44: ...and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased repl...

Страница 45: ...vision 1 02 00 Changed motor feedback pin 8 to reserved 1 01 00 l Declaration of Incorporation added l Environmental Specifications added l Safety information and warnings added updated l Motor Specif...

Страница 46: ...Revision History ARMS Hardware Manual 46 Appendix B www aerotech com This page intentionally left blank...

Страница 47: ...ons 33 Humidity 10 I Inspection Schedule 41 L label 15 lubrication 41 Lubrication 41 M mounting surface cleaning 25 securing stage 25 P part number 15 Performance Specifications S 130 34 S 180 35 S 24...

Страница 48: ...Index ARMS Hardware Manual Support 2 T Technical Support 2 Thermistor Specifications 33 V Vacuum Operation 14 Vibration 10 W Warranty and Field Service 43 48 Index www aerotech com...

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