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Advanced Energy Industries, Inc.

1625 Sharp Point Drive Fort Collins, CO 80525 USA

970.221.4670 [email protected]

RFG 1251 Generator

User Manual

5706058-A

August 1999

Содержание RFG 1251

Страница 1: ...Advanced Energy Industries Inc 1625 Sharp Point Drive Fort Collins CO 80525 USA 970 221 4670 support ftc1 aei com RFG 1251 Generator User Manual 5706058 A August 1999...

Страница 2: ......

Страница 3: ...User Manual RFG 1251 Generator 5706058 A...

Страница 4: ...y Industries Inc Arc Check is a trademark of Advanced Energy Industries Inc Arc Out is a trademark of Advanced Energy Industries Inc Astral is a trademark of Advanced Energy Industries Inc Crystal is...

Страница 5: ...1 5 Chapter 2 Theory 2 1 General Description 2 1 Theory of Operation 2 1 Chapter 3 Specifications 3 1 Physical Specifications 3 1 Electrical Specifications 3 1 Environmental Specifications 3 3 Chapte...

Страница 6: ...Output Power 5 3 Chapter 6 Operation 6 1 First Time Operation 6 1 Chapter 7 Troubleshooting and Customer Support 7 1 Before Calling AE Customer Support 7 1 Checks with the Power Off 7 1 Checks with t...

Страница 7: ...G 1251 simplified block diagram 2 2 Figure 4 1 User port connector 4 1 Figure 4 2 Interface schematics 4 5 Figure 4 3 Water control connector 4 6 Figure 4 4 AC power connector 4 6 Figure 4 5 RFG 1251...

Страница 8: ...x List of Figures 5706058 A Advanced Energy...

Страница 9: ...2 Electrical Specifications 3 1 Table 3 3 Climatic Conditions 3 3 Table 3 4 Environmental Specifications 3 3 Table 4 1 User Port Signals 4 2 Table 4 2 User Port Pins 4 3 Table 4 3 Water Control Connec...

Страница 10: ...xii List of Tables 5706058 A Advanced Energy...

Страница 11: ...y find what is being discussed the manual presents certain words and phrases in type that are different from the rest of the text We use the following type conventions Pin and signal names appear in c...

Страница 12: ...on labels on your unit Hazardous Voltage Short circuit protected High voltage Protective earth ground DANGER This box identifies hazards that could result in severe personal injury or death WARNING Th...

Страница 13: ...ot surface SAFETY Do not attempt to install or operate this equipment if you have not first acquired proper training Ensure that this unit is properly grounded Ensure that all cables are properly conn...

Страница 14: ...BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it Table 1 1 Electromagnetic Compatibility EMC Directive Description 89 336 EEC 92 31 EEC EC Co...

Страница 15: ...ded cable on the input power connector Use only a shielded power cable on the output power connector Install and operate this device only in a pollution degree 2 or better environment which means an i...

Страница 16: ...1 6 Introduction 5706058 A Advanced Energy...

Страница 17: ...nerator uses water as a cooling medium and provides control signals for powering an externally mounted water flow solenoid When the RF output is disabled the cooling water flow may be shut off to cons...

Страница 18: ...is provided to the inverter section 3 2 Auxiliary Supply The auxiliary supply provides dc power to control and logic circuits throughout the unit Its switching design operates at 220 kHz and generate...

Страница 19: ...of this section results in low heat dissipation which allows a compact arrangement of components The PA has a built in 65 headroom for reliability when operated into plasma loads It uses a new class...

Страница 20: ...ling OP AMP The measurement system provides inherent linearity and a wide dynamic range It is calibrated using a computerized test station Once calibrated no adjustments are required or provided in th...

Страница 21: ...onnector Cable Specifications RF Output Connector N female AC Power Input 5 pin male bulkhead mounted Harting series Han Q Chassis EMI Ground 8 32 tapped hole User Port Connector 25 pin subminiature D...

Страница 22: ...to a 50 load Power Repeatability same generator 0 5 of setpoint or 0 2 W whichever is greater into a 50 load Harmonics At full rated output all harmonics are 55 dBc below the RF output signal when ope...

Страница 23: ...0 C 41 F to 104 F Class 3K2 10 to 85 Note 1 2 g m3 to 25 g m3 Class 3K3 80 kPa to 106 kPa 800 mbar to 1060 mbar approximately 2000 m above sea level Storage Class 1K4 25 C to 55 C 13 F to 131 F Class...

Страница 24: ...nitrate 10 ppm Total sulfate 100 ppm Total dissolved solids 250 ppm Total hardness expressed as calcium carbonate equivalent less than 250 ppm Specific resistivity of 2500 cm or higher at 25 C Total...

Страница 25: ...otherwise specified all analog signals are 0 to 10 V while all digital signals are opto coupled digital inputs require 4 to 30 V for a logic high while digital outputs are open collector signals with...

Страница 26: ...s 1000 pF at the EMI filter in the generator Digital Outputs The status signals provided by the generator pins 14 20 22 24 and 12 are opto coupled with NPN transistor outputs industry type 4N37 The co...

Страница 27: ...ion mode selection This signal is scaled to represent 0 to 1250 W 4 17 RF PWR ON Digital Input This signal is used to control the RF output of the generator A voltage level of 4 to 30 V on pin 4 enabl...

Страница 28: ...string which must be closed to enable ac power in the generator A contact resistance of 15 or less across these pins closes the loop Pin 10 is connected to 30 V in the generator 24 11 AC ON Digital O...

Страница 29: ...should be minimized by keeping the cable length as short as possible The maximum recommended cable length between the generator and the controller is 35 feet To minimize interference from adjacent ele...

Страница 30: ...ower jack Switchcraft P N 712A Signal characteristics 24 Vdc switched power source for an external coolant control solenoid AC POWER CONNECTOR Figure 4 4 AC power connector Table 4 3 Water Control Con...

Страница 31: ...Safety Earth Ground green yellow wire Table 4 5 Status Indicators AC ON This green LED indicates that ac power is available within the generator RF ON This green LED indicates that the RF output is en...

Страница 32: ...that the generator is unable to supply the requested power level due to a limiting condition in the generator Power limits can be caused by load mismatches high reflected power or excessive internal...

Страница 33: ...5706058 A Connectors Indicators and Controls 4 9 RFG 1251 Generator CONNECTOR PANEL Figure 4 5 RFG 1251 panel...

Страница 34: ...4 10 Connectors Indicators and Controls 5706058 A Advanced Energy...

Страница 35: ...ysical damage If no damage is apparent proceed with the unit connections If you do see signs of shipping damage contact Advanced Energy Industries Inc and the carrier immediately Save the shipping con...

Страница 36: ...5 2 Installation 5706058 A Advanced Energy DIMENSIONAL INFORMATION Figure 5 1 RFG 1251 dimensions NEED...

Страница 37: ...3 Connect a power cord with its mating Harting connector to the generator and lock the latching lever The power cord should meet the electrical specifications found in Table 3 2 with four 14 AWG wire...

Страница 38: ...5 4 Installation 5706058 A Advanced Energy...

Страница 39: ...ker on the RFG 1251 Verify that the green AC ON indicator is lit on the generator and that the AC ON status signal is active on the User Port low impedance between pins 24 and 11 All other LED indicat...

Страница 40: ...or is lit and there is no RF power being produced by the generator FWD DELV PWR MONITOR signal should go to 0 9 Close the interlock loop again by reconnecting pins 10 and 23 on the User Port Verify th...

Страница 41: ...damage to the unit cables and connectors 3 Make sure all unit connectors are installed correctly and are fastened tightly 4 Check to determine whether any system related circuit breakers have been tr...

Страница 42: ...of time resulting in AUX supply shut down Turn the circuit breaker on Check the cooling water for proper opera tion Let the generator cool down The AUX supply will automatically turn back on when coo...

Страница 43: ...ne 978 371 1381 Fax 978 371 0569 Email pats ftc2 aei com AE Texas 8601 Cross Park Drive Austin TX 78754 USA Phone 512 231 4200 Fax 512 719 9042 Email BrianC aes1 aei com AE GmbH Raiffeisenstrasse 32 7...

Страница 44: ...s due to defects in material and workmanship for 12 months after they are shipped from the factory please see warranty statement below for details In order to claim shipping or handling damage you mus...

Страница 45: ...r any particular purpose except as specifically stated in printed AE specifications The sole responsibility of the Seller shall be that it will manufacture the goods in accordance with its published s...

Страница 46: ...7 6 Troubleshooting and Customer Support 5706058 A Advanced Energy...

Страница 47: ...t before calling 7 1 contact information 7 3 D digital input 4 2 digital outputs 4 2 driver exciter 2 3 E electrical specifications 3 1 environmental specifications 3 3 F frequency 3 2 full rated outp...

Страница 48: ...1 on unit 1 2 T theory of operation 2 1 transient response 3 2 troubleshooting tables 7 2 U unpacking the unit 5 1 user manual icons used 1 1 symbols used 1 2 type conventions 1 1 user port 4 1 user...

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