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5705211-C
Product Specifications
3-7
HFV 8000 Generator
Harmonics
At full rated output, all harmonics are 21 dB below the
RF output signal when operated into a 50
Ω
,
nonreactive load impedance. All spurious
(nonharmonic) outputs are 30 dB below the RF output
signal.
AC Line Sag Response
The HFV generator is compliant with the SEMI F47-
0200 guidelines for voltage sag immunity; the power
regulation folds back during a voltage event, then self-
recovers.
Table 3-3.
Electrical specifications (Continued)
Description
Specification
Содержание HFV 8000
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