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1-6

Safety and Product Compliance Guidelines

5705211-C

Advanced Energy

®

INDUSTRY GUIDELINES

This device must be installed and used only in compliance with the standards listed in 
addition to VDE 0113, EN 60204 (IEC 204), and applicable requirements.

Conditions of Use

To comply with the stated directives and standards, you must meet the following 
conditions of use: 

•

This device must be used in an overvoltage category II installation only.

•

Before making any other connection, connect the auxiliary Protective Earth 
ground conductor on the rear panel.

•

Use only a shielded power cable on the output power connector.

•

Install and operate this device only in a pollution degree 2 or better environment, 
which means an indoor location such as a computer room, office, or factory floor 
where only nonconductive pollution occurs during operation. Occasionally, a 
temporary conductivity caused by condensation occurs when the device is not 
operating.

•

Nonstandard connectors for input/output power must be inaccessible to the user.

•

Use only shielded cables on control, interface, and communication connectors.

INTERLOCKS

Table 1-3. 

Industry guidelines

Guideline

Description

SEMI F47-
0200

Specification for Semiconductor Processing Equipment Voltage 
Sag Immunity*

SEMI S2-0200

Environmental, health, and safety guidelines for semiconductor 
manufacturing equipment

*The power regulation folds back during a voltage sag event, then self-recovers. 

Advanced Energy Industries, Inc. products may include interlocks. When 
interlocks exist, they are not intended for the protection of the operator, 
but are intended to prevent damage to equipment or property. Hazardous 
areas of Advanced Energy products are not operator accessible; the use 
of a tool is required.

Содержание HFV 8000

Страница 1: ...HFV 8000 Generator 2 MHz 208 V Input with DeviceNet March 2004 5705211 C User Manual...

Страница 2: ......

Страница 3: ...User Manual HFV 8000 Generator 2 MHz 208 V Input with DeviceNet 5705211 C...

Страница 4: ...entire manual and all other publications pertaining to the work to be performed before you install operate or maintain this equipment Practice all plant and product safety instructions and precaution...

Страница 5: ...ngoing and the writing staff welcomes and appreciates customer feedback Please send any comments on the content organization or format of this user manual to tech writing aei com To order a manual ple...

Страница 6: ...iv 5705211 C Advanced Energy...

Страница 7: ...ives and standards 1 5 Industry Guidelines 1 6 Conditions of Use 1 6 Interlocks 1 6 Chapter 2 Product Overview and Theory General Description 2 1 Theory of Operation 2 2 Chapter 3 Product Specificatio...

Страница 8: ...eNet Interface Information and Supported Features 4 41 DeviceNet Message Types 4 42 DeviceNet Class Services 4 42 DeviceNet Object Classes 4 43 DeviceNet Data Types 4 43 Identity Object Class Code 01...

Страница 9: ...dicator 5 16 Monitoring the Generator 5 17 Running Internal Diagnostics 5 18 Chapter 6 Troubleshooting and Global Customer Support Before Calling AE Global Customer Support 6 1 Troubleshooting Guide 6...

Страница 10: ...viii 5705211 C Advanced Energy Returning Units for Repair 6 11 Warranty 6 12 Authorized Returns 6 12 Warranty Statement 6 13...

Страница 11: ...4 42 Table 4 12 DeviceNet supported class services 4 42 Table 4 13 DeviceNet supported object classes 4 43 Table 4 14 DeviceNet data types 4 43 Table 4 15 Identity object class attributes 4 44 Table 4...

Страница 12: ...ication object common services 4 52 Table 4 35 Structure of the poll command message 4 54 Table 4 36 Poll response message 4 55 Table 4 37 DeviceNet voltage ranges 4 56 Table 5 1 Frequency values in c...

Страница 13: ...wer enable 4 8 Figure 4 5 Forward load power set point 4 8 Figure 4 6 RF power on status 4 9 Figure 4 7 Interlock loop 4 9 Figure 4 8 Serial AE Bus Host port connector 4 10 Figure 4 9 Graphic represen...

Страница 14: ...xii 5705211 C Advanced Energy...

Страница 15: ...PRETING THE MANUAL The following sections explain the document type conventions and the danger warning and caution boxes that provide information about the specific levels of hazard seriousness Type C...

Страница 16: ...ment without proper training Ensure that this unit is properly grounded Ensure that all cables are properly connected Verify that input line voltage and current capacity are within specifications befo...

Страница 17: ...nce Guidelines 1 3 HFV 8000 Generator Interpreting Product Labels The following labels could appear on your unit Hazardous voltage Short circuit protected High voltage Protective Earth ground Earth gr...

Страница 18: ...compliance with the standards and directives Product Certification Certain options of this product are certified by Canadian Standards Association CSA NRTL C CE marking self addressed by AE Complianc...

Страница 19: ...ode of Federal Regulations Limits and methods of measurement of radio interference characteristics of industrial scientific and medical equipment EN 55011 Limits and methods of measurement of radio di...

Страница 20: ...ory floor where only nonconductive pollution occurs during operation Occasionally a temporary conductivity caused by condensation occurs when the device is not operating Nonstandard connectors for inp...

Страница 21: ...ock OK Indicator Off on page 6 5 Figure 1 1 illustrates the interlock circuit Figure 1 1 Interlock circuit Table 1 4 Hardware interlocks Interlock Mechanism Detection Method Equipment Condition While...

Страница 22: ...1 8 Safety and Product Compliance Guidelines 5705211 C Advanced Energy...

Страница 23: ...Operation on page 5 8 and Normal Operation on page 5 12 You can control the HFV generator through a 15 pin custom analog Generator User port see Generator User Port 15 Pin on page 4 1 or through a Dev...

Страница 24: ...generator operates from a 208 VAC 3 50 60 Hz power source and can tolerate arbitrary phase rotation of the input power connections The HFV generator is water cooled with all power interface port and...

Страница 25: ...on The RF power conversion module converts DC power to regulated RF power 5 Water solenoid optional The optional water solenoid provides water flow control If your generator has this option the valve...

Страница 26: ...2 4 Product Overview and Theory 5705211 C Advanced Energy...

Страница 27: ...l In addition it has is a 5 pin DeviceNet interface A 9 pin serial Host port RS 232 RS 422 and RS 485 compatible is available for pre selecting the frequency or frequency tuning algorithm You can acce...

Страница 28: ...he HFV generator will not reduce performance when the inlet water temperature is 15 C to 30 C 59 F to 86 F and the flow rate is 11 4 lpm 3 gpm or greater All supplied water connections should be 9 53...

Страница 29: ...5705211 C Product Specifications 3 3 HFV 8000 Generator PHYSICAL SPECIFICATIONS Figure 3 1 illustrates the HFV generator s physical dimensions and Table 3 2 describes the physical specifications...

Страница 30: ...3 4 Product Specifications 5705211 C Advanced Energy Figure 3 1 Mounting dimensions shown without optional water solenoid...

Страница 31: ...tional water solenoid See also Figure 3 1 on page 3 4 Weight 34 kg 75 lb maximum Connector cable specifications RF output SQS female connector Note RF output cable not provided RG 393 or equivalent re...

Страница 32: ...0 W Regulation Across full frequency range into 50 load Forward power regulation mode is 3 0 of set point or 24 W whichever is greater Load power regulation mode is 4 0 of set point or 32 W whichever...

Страница 33: ...50 nonreactive load impedance All spurious nonharmonic outputs are 30 dB below the RF output signal AC Line Sag Response The HFV generator is compliant with the SEMI F47 0200 guidelines for voltage s...

Страница 34: ...800 mbar to 1060 mbar approximately 2000 m above sea level Transportation Class 2K3 25 C to 70 C 13 F to 158 F Class 2K3 95 Note 2 60 g m3 Note 3 Class 2K3 70 kPa to 106 kPa 700 mbar to 1060 mbar app...

Страница 35: ...the water that cools the HFV generator pH between 7 and 9 Total chlorine 20 ppm Total nitrate 10 ppm Total sulfate 100 ppm Total dissolved solids 250 ppm Total hardness expressed as calcium carbonate...

Страница 36: ...3 10 Product Specifications 5705211 C Advanced Energy...

Страница 37: ...the Generator User port must be satisfied for the HFV generator to operate In other words even if you are controlling the HFV generator through the DeviceNet interface the interlock signal must be sat...

Страница 38: ...ng strap Note Grounding the User port at the HFV generator reduces noise interference To avoid ground loop problems you should typically ground only one end of the User port cable Generator User Port...

Страница 39: ...or not in fault mode See Table 5 2 on page 5 17 See Figure 4 4 on page 4 8 for an electrical diagram 5 6 FORWARD LOAD POWER SET POINT Analog input 0 V to 10 V 0 W to 8000 W The set point circuitry use...

Страница 40: ...e enabled and the set point level must be above the minimum specification see Electrical specifications on page 3 5 8 RF POWER ON STATUS REFERENCE Output Floating pin that can be used as a reference f...

Страница 41: ...th an external closure between pins 11 and 12 provided front panel Standby switch is closed and RF output cover is on External series resistance must be 15 or less This pin is tied to 15 V by a resett...

Страница 42: ...nnected to the emitter of an opto coupler You must limit current draw through this pin to 45 mA or less Note Defined by DeviceNet Specification Release 2 0 see the Open DeviceNet Vendor Association we...

Страница 43: ...munication Interfaces 4 7 HFV 8000 Generator INTERCONNECT SCHEMATICS The following electrical diagrams detail the interface circuitry in the HFV unit Figure 4 2 Reflected power Figure 4 3 Forward load...

Страница 44: ...4 8 Communication Interfaces 5705211 C Advanced Energy Figure 4 4 RF power enable Figure 4 5 Forward load power set point...

Страница 45: ...nterlock loop SERIAL I O HOST PORT RS 232 WITH AE BUS The HFV generator provides a serial communications interface through the AE Bus Host port The Host port enables you to modify the default settings...

Страница 46: ...pin female shielded subminiature D connector To access the Host port 1 Use a screwdriver to remove the two screws from the rear panel access cover see Figure 5 2 on page 5 4 2 Remove the rear panel ac...

Страница 47: ...in the OPEN or OFF position represents a binary 1 for address selection purposes Table 4 3 lists the switch designations and Table 4 4 lists the baud rate selections 8 RESERVED Reserved for future us...

Страница 48: ...high order bytes Table 4 5 lists the Host port transmission parameters Table 4 4 Baud rate for Host port BR1 BR0 RS 232 switch 8 open Baud Rate RS 485 422 switch 8 closed Baud RateNote 1 Closed Close...

Страница 49: ...re binary data nothing is coded in ASCII and is designed to facilitate direct communications between a host computer and the HFV generator The AE Bus message packet combines a set quantity of bits and...

Страница 50: ...checksum byte when calculating the value for these bits see AE Bus Checksum Byte on page 4 15 AE BUS COMMAND NUMBER BYTE This one byte field contains an 8 bit value from 0 to 255 00h to ffh represent...

Страница 51: ...of bytes in each of the preceding fields The transmitting unit determines this value by accumulating the exclusive or XOR of all bytes of the packet up to but not including the checksum value The rece...

Страница 52: ...cknowledgment ACK hexadecimal 06h to the host computer If the HFV generator receives a request for data or status information it gathers and sends the requested information Otherwise it evaluates the...

Страница 53: ...smissions until the host computer stops the cycle If the HFV generator receives no response it assumes an ACK and returns to the waiting state AE BUS COMMUNICATIONS TRANSACTION EXAMPLE Figure 4 11 is...

Страница 54: ...4 6 Command Status Response CSR codes Value Meaning 0 Command accepted The following CSR codes are sent in response to a command that was not accepted and indicate why the command was not accepted 1 C...

Страница 55: ...sponse CSR This single byte response indicates whether the unit has accepted or rejected the command and in the case of rejection the reason the unit could not respond to the command For more informat...

Страница 56: ...For example enter 2000000 2 000 000 Hz Set maximum frequency with command 4 Set starting frequency value with command 5 Read back with command 133 See also Frequency Limits on page 5 14 4 1 CSR only 4...

Страница 57: ...ameters Resets tuning parameters to factory defaults Send 1 byte to select the setting 0 Keep current settings 1 Factory defaults 1 1 CSR only 11 frequency rate of change Specifies the frequency rate...

Страница 58: ...ur bytes least significant byte first representing the tuning delta limit Accepts a value of 1 to 100000 Read back with command 155 See also Tuning delta limit Hz on page 5 15 4 1 CSR only 19 scan del...

Страница 59: ...hree or four byte ASCII string HFV or HFV L 0 3 or 4 byte ASCII string 129 report device size Reads the output power value in watts The controller board returns a four byte ASCII string 8000 8000 W 0...

Страница 60: ...ns four data bytes representing the starting frequency in Hertz Range is 1765000 to 2165000 For example 2000000 2 000 000 Hz Set with command 5 0 4 136 report forward power Reads the generator forward...

Страница 61: ...ple 1330 1 330 decimal is implied 0 2 147 report actual frequency out Reads the actual frequency value The controller board returns four data bytes representing the actual frequency value in Hertz For...

Страница 62: ...representing the scan delta in Hertz For example 10000 10000 Hz Set with command 19 See also Scan delta frequency Hz on page 5 15 0 4 157 report scan threshold Requests the threshold at which the sca...

Страница 63: ...single step 2 Breakpoint 3 Overflow 4 Array bounds exception 5 Undefined opcode 6 Escape opcode exception 7 Numeric coprocessor exception 3rd status byte 0 Center frequency 1 Set point unscaled 2 Wid...

Страница 64: ...or example 11358 2839 5 h 0 4 196 report RF On total time Reads the RF On total time The controller board returns 4 data bytes each count equal to 0 25 h For example 10235 2558 75 h 0 4 197 report kil...

Страница 65: ...requested voltage value 1 2 200 report software checksum Reads the logic software checksum 0 2 201 report software configuration ID Reads the software configuration ID string The controller board ret...

Страница 66: ...d 1 250 kbd 2 500 kbd Note If the DeviceNet is not installed or powered the response data byte will be 255 0 1 204 report DeviceNet software version Reads software version of DeviceNet interface The c...

Страница 67: ...d power regulation 43 Load power regulation Byte 9 represents process status information 40 Power failure 41 Unassigned interrupt has occurred 42 A D conversion failure 43 Output on 44 Load power regu...

Страница 68: ...cess status information 40 At set point 41 Datalogging enabled 42 RF enabled without interlock 43 Heartbeat time out off Bytes 13 16 represent the frequency value in Hertz 4For example 2000000 2 000 0...

Страница 69: ...et communication faults that has occurred 7 The number of times RF enable has been set without the interlock set 8 The number of line faults that have occurred 9 The number of overtemperature faults t...

Страница 70: ...al operating parameters Bytes 5 and 6 The reflected power value at the time of the test Byte 7 Inverter power test 40 The value is in range 41 The value is out of nominal operating parameters Bytes 8...

Страница 71: ...out of nominal operating parameters Bytes 23 and 24 The ground value at the time of the test Byte 25 I inverter test 40 The value is in range 41 The value is out of nominal operating parameters Bytes...

Страница 72: ...st Byte 40 30 V supply test 40 The value is in range 41 The value is out of nominal operating parameters Bytes 41 and 42 The 30 V supply value at the time of the test Byte 43 15 V supply test 40 The v...

Страница 73: ...g 250 report serial number Reports the unit serial number The controller returns 4 bytes representing the serial number 0 4 255 reportlogged data Reads a data packet from the log buffer Send two bytes...

Страница 74: ...eviceNet connector and Table 4 8 describes each pin Figure 4 12 DeviceNet connector DeviceNet Control Panel Figure 4 13 shows the DeviceNet control panel Figure 4 13 DeviceNet control panel Table 4 8...

Страница 75: ...ates refer to the current DeviceNet specification available from the ODVA web site at http www odva org For further information about module status indications during power up refer to the current Dev...

Страница 76: ...iving power check the MOD LED Green steady Link okay Unit is on line and allocated to the master Green flashing On line not connected Unit is on line but has no connections in its existing state becau...

Страница 77: ...d LSD least significant digit to select the DeviceNet network address MAC ID MAC IDs 0 through 63 are valid Use the MSD switch to select the MAC ID s most significant digit use the LSD switch to selec...

Страница 78: ...types listed in Table 4 11 Note In Table 4 11 xxxxxx Node address DEVICENET CLASS SERVICES As a GROUP 2 slave device the Advanced Energy DeviceNet interface supports the class services and instance se...

Страница 79: ...vice Table 4 13 DeviceNet supported object classes CAN Identifier GROUP 2 Message Type 01 0x05 Identity see page 4 43 for more information 02 0x0E Router see page 4 45 for more information 03 0x10 Dev...

Страница 80: ...cific set to 0 Bit 8 Minor configuration fault status 40 No fault Table 4 15 Identity object class attributes Attribute Access Name Type Value 1 Get Revision UINT 1 2 Get Max Object Instance UINT 1 6...

Страница 81: ...t through which a client may address a service to any object class or instance residing in the physical device Table 4 18 lists the class attributes Table 4 19 lists the instance 1 attributes Table 4...

Страница 82: ...last value set Note 2 This parameter may be set only if the DATA RATE switch is set in the PGM programmable range The value returned will be the value indicated on the DeviceNet control panel rotary...

Страница 83: ...CLASS CODE 04 0X04 The assembly objects bind attributes of multiple objects to allow data to or from each object to be sent or received over a single connection Table 4 24 lists the class attributes...

Страница 84: ...rature status 40 Not at overtemperature 41 Overtemperature Bit 3 Unused Bit 4 INTS interlock status 40 Interlock not satisfied 41 Interlock satisfied Bits 5 through 7 Unused Table 4 25 Assembly object...

Страница 85: ...poll message Table 4 31 lists the common services Table 4 27 Assembly object common services Service Code Class Instance Service Name 14 0x0E Yes Yes Get_Attribute_Single 16 0x10 No Yes Set_Attribute...

Страница 86: ...n Connection UINT Note 2 below 5 Get Consumed Connection UINT Note 2 below 6 Get Initial Communication Characteristic USINT 0x1 7 Get Production Size UINT 9 8 Get Consumed Size UINT 5 9 Get Set Expect...

Страница 87: ...d as 0 Time out default for I O 1 Auto delete default for explicit message 2 Auto reset 3 Deferred delete APPLICATION OBJECT CLASS CODE 64 0X40 THE FOLLOWING SECTION IS FOR RF SUPPLIES ONLY 16 Get Con...

Страница 88: ...r on off status Table 4 32 Application object class attributes Attribute Access Name Type Value 1 Get Revision UINT 1 2 Get Max Object Instance UINT 1 6 Get Max Class Identifier UINT 7 7 Get Max Insta...

Страница 89: ...satisfied 41 Interlock satisfied Bits 5 through 7 Not used Note 6 Maximum power expressed in 12 bit A D units with upper 4 bits 0 Note 7 Not used dummy value Note 8 Not used dummy value DeviceNet Ope...

Страница 90: ...on page 4 41 DEVICENET MESSAGING POLL AND EXPLICIT COMMANDS The Advanced Energy DeviceNet interface supports both poll command messaging and explicit command messaging POLL COMMAND AND POLL RESPONSE...

Страница 91: ...zero All poll commands and response messages are scaled so that 0FFFh full rated forward power Note 2 Reflected power sense is a 16 bit value but only 12 bits are used The 16 bit value should be shift...

Страница 92: ...to the full rated output power of the HFV generator scaled 0 V to 10 V Use Table 4 37 to define the voltage ranges and the corresponding digital values assuming N is the number of bits of resolution a...

Страница 93: ...0x40 instance 1 attributes to retrieve maximum power readings Note 1 The maximum power attribute returns a value in watts if the unit is operating as a stand alone device For example a value of 20 000...

Страница 94: ...4 58 Communication Interfaces 5705211 C Advanced Energy...

Страница 95: ...Installation Requirements Install this unit according to the following requirements Operating and maintenance personnel must receive proper training before installing troubleshooting or maintaining h...

Страница 96: ...signs of shipping damage contact Advanced Energy Industries Inc and the carrier immediately see AE Global Customer Support on page 6 10 Save the shipping container for submitting necessary claims to...

Страница 97: ...5705211 C Installation Setup and Operation 5 3 HFV 8000 Generator Front Panel Drawing Figure 5 1 Front view...

Страница 98: ...and Operation 5705211 C Advanced Energy Rear Panel Drawing Figure 5 2 Rear view shown with optional water solenoid Rear access panel that houses the Host port connector and an 8 pin DIP switch 3 W PE...

Страница 99: ...10 32 screw A suitable chassis ground connection made to this mounting hole prevents or minimizes radio frequency interference Connecting Cooling Water This generator is water cooled Do not operate t...

Страница 100: ...Note Keep the water cooling system running as long as the rear circuit breaker is on to help maximize the cooling of the auxilliary supply which is also water cooled Connecting I O and Auxiliary Conn...

Страница 101: ...fety connector cover on the generator and fasten with screws and star washers Note The screws and star washers must be securely installed to prevent excessive RF emissions and electrical shock Connect...

Страница 102: ...o the load with an RG 393 cable and an appropriate load If you connect the generator to your chamber be sure to satisfy all chamber conditions for operation This generator must be used in a pollution...

Страница 103: ...age 4 20 Before Enabling the Output 1 Be sure to complete the steps in Before Engaging the Rear Circuit Breaker on page 5 9 2 Make sure the Standby Stop switch on the front panel is in the Stop down p...

Страница 104: ...ff on page 6 5 5 In order for the HFV generator to deliver power it must receive an RF On command and the set point or requested output power level must be above a specified minimum see pin 4 and pin...

Страница 105: ...Frequency Band Table 5 1 lists the frequency values for the four possible frequency band options top side full and custom To set the frequency band 1 Press the Display Mode button repeatedly until th...

Страница 106: ..._ _ _RFL_ _ _ _ STP_ _ _ _ _ _ _ _KHZ NORMAL OPERATION You can operate the HFV generator either as a center frequency generator or as a variable frequency generator where the operating frequency is au...

Страница 107: ...5 16 Note Cycling AC power circuit breaker to the generator will cause the generator to automatically return to automatic tuning mode You will need to repeat the steps in Selecting Center Frequency M...

Страница 108: ...anced Energy offers HFV Virtual Front Panel VFP software that can help you characterize a chamber and identify appropriate tuning settings for it then set those parameters refer to the HFV VFP softwar...

Страница 109: ...h the Generator User port on the HFV unit See Table 4 7 command 14 tuning goal Tuning gain This parameter affects the size of the tuning steps the larger the number the greater the size of the tuning...

Страница 110: ...the indicator will display the state Note FAULT automatically displays when a fault condition occurs If the display mode switch is not pressed for five minutes the display returns to MODE 1 unless a...

Страница 111: ...n page 6 5 for troubleshooting interlock problems Load Regulation This green indicator illuminates whenever load delivered power regulation mode is selected An unlit indicator means that forward power...

Страница 112: ...ecified accuracy spec If RF power is on an unlit indicator indicates that an internal power limit has been reached Fault This yellow indicator illuminates whenever An overtemperature condition exists...

Страница 113: ...u must not have RF enable set If the RF Enable is set prior to running diagnostics you will receive a CANNOT RUN DIAGNOSTICS notification on the front panel display 6 Make sure the interlock is satisf...

Страница 114: ...5 20 Installation Setup and Operation 5705211 C Advanced Energy...

Страница 115: ...shooting problems Note If you have a question regarding DeviceNet or the Host port contact AE Technical Support see AE Global Customer Support on page 6 10 1 Is the front panel display LCD lit a If ye...

Страница 116: ...icator Off on page 6 7 If these questions do not help solve your problem contact AE Global Customer Support see AE Global Customer Support on page 6 10 ERROR INDICATIONS Front Panel Display LCD Not Li...

Страница 117: ...he RF output enable command If these procedures do not help solve your problem contact AE Global Customer Support see AE Global Customer Support on page 6 10 RF ENABLE WITHOUT INTERLOCK FAULT RF power...

Страница 118: ...e HFV front panel Please see the DeviceNet section for further troubleshooting details To return the unit to Generator User port control 4Disconnect the DeviceNet cable 4Cycle the power on the HFV gen...

Страница 119: ...ure 4 7 on page 4 9 for an electrical diagram WHAT IS THE INTERLOCK The HFV generator uses an interlock circuit to shut off the output in emergency situations The interlock circuit is basically severa...

Страница 120: ...this indicator is off see Interlock OK Indicator Off on page 6 5 3 In order for the HFV generator to deliver power the unit must receive an RF on command and the set point or requested output power l...

Страница 121: ...ernal Diagnostics on page 5 18 If the HFV generator passes this test then proceed to the following section otherwise contact AE Global Customer Support see AE Global Customer Support on page 6 10 EXTE...

Страница 122: ...e to 1000 W the HFV generator s reflected power limit If you answered yes to any one of the previous questions and the HFV generator passed the Internal Diagnostics test the HFV generator is probably...

Страница 123: ...To set the frequency band see Setting the Frequency Band on page 5 11 2 If the reflected power reading is close to 1000 W the troubleshooting steps are the same as those outlined in At Set Point Indic...

Страница 124: ...om We will respond to email by the next business day Note For customers outside the US please contact your local AE office AE Voorhees NJ 1007 Laurel Oak Road Voorhees NJ 08043 USA Phone 800 275 6971...

Страница 125: ...ned Such technical consultation is always free of charge If you return a unit without first getting authorization from Global Customer Support and that unit is found to be functional you will be charg...

Страница 126: ...responsible for obtaining authorization see details below to return any defective units prepaying the freight costs and ensuring that the units are returned to an authorized AE service center AE will...

Страница 127: ...peration and tested in conformity with the seller s published instructions The seller expressly excludes any warranty whatsoever concerning goods that have been subject to misuse negligence or acciden...

Страница 128: ...6 14 Troubleshooting and Global Customer Support 5705211 C Advanced Energy...

Страница 129: ...e see MODE 3 in Display Mode and the LCD Display Indicator on page 5 16 For additional information see Monitoring the Generator on page 5 17 and Center Frequency Mode on page 5 12 D DDS Direct digital...

Страница 130: ...than every 5 ms See Table 4 7 command 11 frequency rate of change L LCD Liquid crystal display The actual display on the front panel S Scan delta frequency This parameter sets the maximum amount of f...

Страница 131: ...does not have the continuous tuning in load power regulation enabled For power regulation mode the generator will tune until a minimum tuning parameter is found It then operates at that output freque...

Страница 132: ...iv 5705211 C Advanced Energy...

Страница 133: ...ons circuits interlock 1 7 command 4 14 commands data logging on off 4 23 frequency rate of change 4 21 Host port 4 18 Host port time out value 4 24 maximum frequency 4 20 minimum frequency 4 20 repor...

Страница 134: ...5705211 C ii HFV 8000 Generator...

Страница 135: ...eNet port 3 5 generator user 3 5 Host port 3 5 RF output 3 5 User port 3 5 connectors condition of use 1 6 Host Host port 4 10 User port 4 1 control panel DeviceNet 4 39 controls front panel 5 4 coola...

Страница 136: ...15 front panel controls 5 4 indicators 5 4 interlock 1 7 functional specifications 3 1 G general description 2 1 general transmission parameters 4 12 Generator User port see User port global customer...

Страница 137: ...regulation indicator 5 17 M manual see user manual marking CE 1 4 message packet 4 13 illustration 4 13 modes output regulation 3 1 selecting automatic tuning 5 13 selecting center frequency 5 12 mou...

Страница 138: ...iagram 4 8 indicator 5 18 setting the frequency band 5 11 shielding condition of use 1 6 shielding requirements 5 5 signals see also pin descriptions analog 4 1 digital 4 1 User port pin descriptions...

Страница 139: ...nd 4 22 tuning phase 5 14 T V 1 4 U unpacking 5 2 user manual labels used 1 3 type conventions 1 1 User port 4 1 cable requirements 4 2 pin descriptions 4 2 signals 4 2 see also DeviceNet V VFP 2 1 5...

Страница 140: ...5705211 C viii HFV 8000 Generator...

Страница 141: ...ix 5705211 C Advanced Energy...

Страница 142: ...Index x 5705211 C Advanced Energy...

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