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GB 01742 - Edition 04 - Nov 12

1/1

Maintenance components

ATH 2300 M/MT Operating Manual

Detailed contents

F 000

Spare parts - Instructions of use

- Replacement of parts and use of non genuine parts

F 100

First level maintenance parts

adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

Содержание ATH 2300 M

Страница 1: ...Operating instructions Operating instructions Translated from original version Translated from original version ATH 2300 M MT Turbopumps EN EN ...

Страница 2: ... microscopes Surface analysis Research and development High energy physics Space simulation Accelerators Advantages High throughput Quiet and clean vacuum Corrosion proof High MTBF Minimum size volume and weight Smart and compact electronic controller Reliability Maintenance free Battery free Easy integration This operating instruction manual includes only the instructions to connect the pump to t...

Страница 3: ... copying this document in whole or any part without prior written authorization from adixen Vacuum Products Specifications and information are subject to change without notice by adixen Vacuum Products This product complies with the requirements of European Directives listed in the Declaration of Conformity contained in sheet G100 of the controller operating instructions adixen Vacuum Products Ope...

Страница 4: ...er C OPERATION C 100 Safety instructions for product use Chapter D MAINTENANCE D 100 Safety instructions for product maintenance D 150 Maintenance frequency Chapter E MAINTENANCE INSTRUCTIONS E 50 Replacement of the water valve coil E 100 Shipping procedure for contaminated pumps Chapter F MAINTENANCE COMPONENTS F 000 Spare parts Instructions of use F 100 First level maintenance parts Chapter G AP...

Страница 5: ...uct study the Operating instructions and make sure you follow the safety instructions it gives You can recognise these by the Caution Warning and Danger symbols Good practice tips and manufacturer s recommendations are in a blue box Symbols labels Description Warning hot surface Warning hazardous voltage Caution risk of danger Refer to the operating instructions before use ON OFF Do not touch when...

Страница 6: ...he pump operating principle Pumping principle The hybrid turbo pump in an installation The back up ball bearings No maintenance Battery free Variation of the pump rotational speed A 400 Technical characteristics of the pump A 510 The accessories of the pump A 515 Pump accessory dimensions Purge valve 50 sccm dimensions Air inlet valve dimensions Water valve dimensions adixen Vacuum Products Operat...

Страница 7: ...oils Battery free In case of a power failure the pump motor acts like a generator to transform the rotor energy into electrical power to supply the controller ATH 2300 M ATH 2300 MT Integrated heater band Maintaining the pumps internal surface up to 75 C to prevent the condensation effect Temperature regulated by the controller The MT version is supplied with a water valve Controllers The ATH 2300...

Страница 8: ...ctronics Power amplifiers Position of Reference Position return Electro magnet Correction Position sensor Z X X Y Y Movements in relation to these axes are monitored by position sensors According to the position data recorded the controller corrects differences to bring the rotor back to its optimum position by varying the current in electro magnets 3 controlled translations X Y Z 2 controlled til...

Страница 9: ...n the rotor balance due to deposit built up during the life time of the pump are automatically compensated by the unbalanced force rejection control It ensures the lowest possible levels of noise and vibration Stator geometric axis Rotor geometric axis Rotor inertia axis A 200 Control loop of the pump 2 2 GB 02721 Edition 04 Aug 07 adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 10: ...des high pumping speeds and high ultimate vacuum The molecular drag section provides a high compression ratio and extends forevacuum tolerance INLET Dry back up bearings EXHAUST Cooling Magnetic levitated bearings Motor Molecular drag Stator Rotor Gas purge The gas purge provides an excellent protection of the maglev bearings for corrosive applications and ensures the rotor cooling adixen Vacuum P...

Страница 11: ... PRESSURE Primary pumping Rough vacuum High vacuum The built in heater band allows pump heating up to 75 C which is sufficient to avoid the condensation effect This device is controlled by the controller The MT version must be equipped with its water valve the water valve is supplied with the MT model The built in heater band on MT model Heater band At high pressure and high throughput processes s...

Страница 12: ... be deducted depends on the number of incidents The maximum life time of the rotor is described in D 150 Battery free In case of a power failure the motor acts like a generator supplying enough power for the magnetic bearings When the rotation speed is too low the pump shuts down and lands on the back up ball bearings Variation of the pump rotational speed The ATHM pump rotation speed can be selec...

Страница 13: ...17 Sound pressure level db A 47 Pump protection index IP 42 Controller power supply V 200 240 50 60 Hz Maximum leakage current mA 12 Max start up supply W 1000 1250 Power consumption at ultimate pressure W 130 380 Max apparent start up power VA 1700 1900 Mounting orientation any Maximum heating temperature C 75 Heating power of the heating band the same input voltage as the controller W 250 nomina...

Страница 14: ...re 6 C 5 T 45 5 T 25 Use of the product Maximum altitude Accept transient over voltages typi cally present on the main supply Pollution degree applicable Maximum relative humidity 8 m ft C Indoor only 2000 6562 Catégory II 2 80 Three phase motor characteristics max values Voltage between phases Supply frequency Phase current Vrms Hz A 40 1033 12 5 Over 25 C apply a derating on continuous max flow ...

Страница 15: ...50 358 50 290 00 179 00 inch 0 47 9 15 12 70 13 70 12 81 14 11 11 42 7 05 DN 250 CF F mm 26 00 276 50 366 60 392 00 369 50 402 50 306 00 284 00 8 60 32 00 5 625 204 00 inch 1 02 10 89 14 43 15 43 14 55 15 85 12 05 11 18 0 34 1 26 5 625 8 03 DN 200 ISO F mm 16 00 276 50 366 60 392 00 369 50 402 50 306 00 260 00 11 00 12 00 15 204 00 inch 0 63 10 89 14 43 15 43 14 55 15 85 12 05 10 24 0 43 0 47 15 8...

Страница 16: ...0 179 00 inch 0 47 9 15 12 70 13 70 12 81 14 11 11 42 7 05 DN 250 CF F mm 26 00 276 50 366 60 392 00 369 50 402 50 306 00 284 00 8 60 32 00 5 625 204 00 inch 1 02 10 89 14 43 15 43 14 55 15 85 12 05 11 18 0 34 1 26 5 625 8 03 DN 200 ISO F mm 16 00 276 50 366 60 392 00 369 50 402 50 306 00 260 00 11 00 12 00 15 204 00 inch 0 63 10 89 14 43 15 43 14 55 15 85 12 05 10 24 0 43 0 47 15 8 03 DN 200 CF F...

Страница 17: ...ISO K mm 240 12 525 369 50 371 50 473 343 276 50 240 2 7 inch 9 44 0 47 20 66 14 55 14 62 18 62 13 50 10 88 9 44 0 78 0 27 DN 200 ISO F mm 15 12 11 260 285 16 525 369 50 371 50 473 343 276 50 231 2 7 inch 0 59 0 47 0 43 10 23 11 22 0 63 20 66 14 55 14 62 18 62 13 50 10 88 9 09 0 78 0 27 DN 250 CF F mm 5 625 32 8 6 284 306 26 525 369 50 371 50 473 343 276 50 231 2 7 inch 0 22 1 26 0 34 11 18 12 04 ...

Страница 18: ...ion valve at pump inlet The secondary isolation valve is used to maintain the vacuum in the chamber while the pump is reset to atmospheric pressure See the manufacturer s catalog For pumps equipped with purge valve see next page Pumps model Inlet size DN P N for ISO F Description P N for CF F Description ATH 1603 M 200 110675 110676S 12 CHC M10x30 12 CHC M10x35 250 110675 110676S 12 CHC M10x30 12 ...

Страница 19: ...braking time of the pump to put it at the atmospheric pressure It is a NC valve which is activated when the pump nominal speed is below 10 000 rpm Air inlet valve P N 24 V DC 114280 Purge valve 50 sccm P N 24 V DC 111921S The gas purge provides an excellent protection of the maglev bearings for corrosive applications and ensures the rotor cooling The purge of this valve can be isolated during an a...

Страница 20: ...32 1 26 1 8 NPT Can rotate Plug coil Pump connection 62 2 44 82 3 23 65 5 2 58 18 5 0 73 65 2 56 1 8NPT female connector air inlet DN 40 ISO KF Pump connection Connector for coil possible to rotate 1 8 NPT female connector Dust filter Air inlet valve dimensions mm inch adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 21: ...ter valve dimensions mm inch Cable water valve Scale 13 20 Inlet and outlet 1 8 NPT female 0 86 2 15 0 59 54 7 15 15 0 59 38 7 1 88 2 58 1 52 65 6 50 3 1 98 29 7 1 17 47 7 18 0 7 34 2 1 34 0 28 22 7 OUT IN adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 22: ...installation Worst Case Turbo Pump Crash Scenario Definitions B 310 Inlet and exhaust connections B 330 Nitrogen purge and inlet air valve device connections Characteristics of filtered dry nitrogen supply Purge device for DN 16 50 sccm Valve with purge built in purge device 50 sccm Air inlet valve B 340 Water cooling connection Characteristics of water cooling For ATH 2300 M model For ATH 2300 MT...

Страница 23: ... guaranteed provided it is used normally in the operating conditions defined in this manual It is the customer s task to train operators to use the product if they do not speak the language the manual is written in ensure operators know the safe practices to apply when using the product Make sure the equipment shows no sign of transport damage If it has been damaged take the necessary steps to rec...

Страница 24: ...on to the installation It is strongly recommended to secure the maglev turbopump installation to prevent any safety hazard to the user in standard operating conditions B 300 Risk of cut injury The access to the rotor of a turbomolecular pump with an unconnected inlet port is dangerous In the meantime if the pump is not switched on it may be driven by another pump in operation Always connect the pu...

Страница 25: ...EL that will stop chemical supply to the pump when gas is detected over 25 of LEL for that flammable material For non clean process If loss of purge flow creates a significant risk then the purge flow must be monitored externally and a response to loss of purge flow must be provided by the process equipment and interlocked If pyrophoric materials above the LEL lower explosive limit are sent to the...

Страница 26: ...azardous energies Water cooling circuit and nitrogen purge are pressurized hazardous energies Release pressure before servicing 1 for the N2 purge disconnect the gas line 2 for the water cooling circuit disconnect the input connector and leave the output connected Don t forget to put a vessel 1 l under the water output Operation in local mode There is no device to warn that the pump operates in lo...

Страница 27: ... on avoiding any deposition into the pumping line Contact our customer service The manufacturer guarantees the right operation of the pump if it is used in an uniform magnetic field up to 0 5 mT From 0 5 to 5 mT the limit of the right operation depends on the cooling and the gas loads Exceeding 5 mT can cause excessive rotor heating due to the eddy current It is therefore necessary to provide suit...

Страница 28: ...robable hazards This label informs the user that moving parts present inside the pump coud cause personal injury like crushing or cutting The user must keep all body parts away from moving parts MOVING PARTS PRESENT Moving parts can crush and cut Keep hands or feet away from moving parts WARNING The hot surface sticker must be sticked conspicuously on the pump housing The user must label visibly t...

Страница 29: ...ee environment at an ambient temperature between 5 C and 50 C for a period of 2 years maximum If you need to store a pump which has run on clean process don t forget to blow out the water line and to purge the pump with N2 Seal the inlet exhaust and purge ports with blanking plates Don t store the pump more than 6 months in a clean and dry environment Never store a pump which has been used on corr...

Страница 30: ... model Blanked with a DN 40 ISO KF blanking plates Blanked with a DN 16 ISO KF blanking plates The product is supplied with the inlet and exhaust blancked off This prevents foreign bodies entering the pump during transport and storage Do not remove these blanking plates until you are ready to install the product on the vacuum line adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 31: ...t the pump to the customer s handling device using the threaded holes located at the rear of the pump refer to chapter A400 of the operating manual The equipment frame on which the pump is installed must be sufficiently rigid to absorb the kinetic energy of the rotor in case of pump rotor crash For this take into account the maximum loads to calculate the equipment attachment devices the flange di...

Страница 32: ...se of a mechanical failure an improperly installed pump could be ejected from the equipment if the kinetic energy was transferred to the pump body It is absolutely necessary to install the pump according to the following installation specifications to secure the user and the equipment The manufacturer declines any responsibility if the pump installation is not designed in accordance with these ins...

Страница 33: ... parts can be ejected out of the pump inlet flange and can impact on the plate of the valve or any other part of the system If this is placed close to the turbo pump and if it has high stiffness the impact can create a high axial load on the system Such axial force has not been observed on a standard pendulum valve The impact of the rotor parts on the housing will create a radial force on the hous...

Страница 34: ... Bending moment Axial force The resulting maximum loads from a crash have to be taken into account by the pump assembling bolts Design and secure the pump frame so that it can withstand the loads According to the housing type Inlet flange installation conditions item 2 Mounting holes at inlet flanges ATH 2300 M Inlet flange DN250 ISO F with centering ring DN250 ISO F without centering ring DN250 C...

Страница 35: ... ISO K flanges as to secure bolts on ISO F flanges The ISO K flanges do not prevent accidental rotation of the pump on the equipment flange in case of pump rotor crash This rotation could damage the foreline and the purge gas line which would generate hazards for the user Inlet flange installation conditions cont Equipment installation conditions item 3 Option Optionally if the equipment flange ca...

Страница 36: ...lastomers FPM Pump installation with inlet housing facing up connect the pump to the customer s handling device using the threaded holes located at the rear of the pump A 400 of the Operating instructions After connecting the product to the pumping line check for leaks along the entire to ensure proper connections Pollution risk Unclean and contaminated component can increase the pumping down time...

Страница 37: ...nded to install an isolation valve between the chamber to allow chamber venting without stopping the pump At exhaust When pumping on corrosive gases or aggressive gases the gas can cause injury or death The exhaust of the turbopump must be connected to roughing pump line compatible with process gases It is highly recommended to install an isolation valve closed when power is off between the turbo ...

Страница 38: ...rantees a flow rate of 50 sccm at pressure 110 kPa Note N2 supply can be equipped with a mass flow meter and in this case it is not necessary to install the flow reduction device Different connection accessories can be found in the manufacturer catalog Adjust the flow rate Feed the nitrogen purge throughout pumping according to the flow rate and pressure values in the scale given 20 1 0 1 1 1 2 1 ...

Страница 39: ...vice 50 sccm During pump operation it s possible to stop the purge i e for air tightness test of the pump A nitrogen purge can be connected instead of the dust filter 1 8 NPT female Air inlet valve A nitrogen purge can be connected instead of the dust filter 1 8 NPT female Filtered air or N2 purge ATHM A Dust filter When the inert gas purge is stopped the pumped gases can pass from rough vacuum si...

Страница 40: ...led city water can lead to water circuit clogging due to limestone deposition which may necessitate in the worst case a complete cleaning and overhaul of the cooling circuit The presence of micro organisms like aquatic weed and micro biological substances like bacteria can lead to cooling problem in the pump Appropriate water treatment system need to be used to prevent growth of such micro organis...

Страница 41: ... of the MT pump on difficult processes make sure to Connect the heating device set the heating temperature via the controller see Operating Instructions of the controller Connect the water valve check the efficiency of the cooling system and the absence of leaks If stopping the cooling circuit creates a significant risk install a water sensor security on the circuit Heater band connection in the O...

Страница 42: ... in perturbated electromagnetical environment Water valve In this installation we use a roughing isolation valve V1 between the turbo pump and the roughing pump a high vacuum isolation valve V2 between the turbo pump and the chamber to be pumped a relay K1 their contacts drive the valve V1 and the roughing pump power supply the thermostatic option MT pump model We recommend that you fit a separate...

Страница 43: ...GB 01734 Edition 02 Nov 06 1 1 Operation ATH 2300 M MT Operating manual Detailed contents C C 100 Safety instructions for product use adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 44: ...her pump in operation Always connect the pump inlet port before starting the pump Specific operating conditions may exist that require extra caution from users due to the high temperatures generated outer surfaces 70 C wear protective gloves and leave the pump to cool before working on the product Pump damage Make sure that exhaust pipe line and pump internal parts are not clogged by process by pr...

Страница 45: ...ny maintenance operations Before performing a maintenance operation stop the pump When the pump is at rest switch off the pump by setting the controller main switch to 0 wait 5 minutes before disconnecting the main cable If this last one remains connected some components will still be energized Be sure that the controller status is visible from the operator otherwise disconnect the cable from the ...

Страница 46: ...ion 03 Nov 12 1 1 Maintenance ATH 2300 M MT Operating manual Detailed contents D D 100 Safety instructions for product removal D 150 Maintenance Frequency adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 47: ...mp musn t be disconnected as long as the rotor is moving and without having disconnecting the power line cable After pumping on corrosive or toxic gases it is strongly recommended to seal the pump with blanking plates in case of return to the repair service centers E 100 Don t forget to label in a visible way the product for the operator Risk due to pumping conditions Remaining process gases in th...

Страница 48: ...tamination form available on our website and refer to the service conditions G200 Attach it to the product before shipping to the service repair office closest to you How to contact us The overhaul must be performed by manufacturer s trained personnel Contact nearest service center or the service support at the following e mail address support service adixen fr The outside of the product and contr...

Страница 49: ...value is set at 100 When this percentage reaches 0 an alarm is generated pump can t restart and back up ball bearings need to be replaced by authorised Service Center The bearing counter Warning messages for pump maintenance The ball bearing alert threshold can be set on the menu C300 on the controller Operating instructions If the ball bearings life time is smaller than the alert threshold an ale...

Страница 50: ...ntents E E 50 Replacement of the water valve coil Coil dismantling Coil reassembling E 100 Shipping procedure for contaminated pumps Connecting ports Rough decontamination procedure General flushing Purge inlet flushing Pressurize the pump adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 51: ... clip Remove the coil and replace it by a new one Put again the spring clip Install the new o ring on the M5 fitting Stick the first threads of M5 fitting with Loctite 542 glue Screw the M5 fitting and tighten it slightly with a 14 mm open end wrench Registered trade mark Loctite Coil reassembling adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 52: ...CR female 108500 C Purge port A B C D Whenever you return the product to an adixen repair service center please make sure you follow the procedure for returning products and fill in the declaration of contamination see our website link Service Study the safety instructions related to preventive maintenance D 100 A Inlet port Risk of injury by cutting Contact with the pump rotor cell may cause cuts...

Страница 53: ...e pump exhaust port Flush with dry nitrogen for 10 minutes Stop the nitrogen flow 30 10 N2 N2 D Purge port pressurisation Characteristics of dry nitrogen B 330 Install the pump under an extractor hood It must remain there throughout the operation Description P N DN 16 1 8 BSPT flange with anti suckback valve including an injector A458805 Injector 106859 Description P N Kit for DN 200 ISO F flange ...

Страница 54: ...ntaminated pumps 3 Pressurize the pump Blank the inlet port and exhaust port Pressurize the pump with dry nitrogen to an absolute pressure of 110 kPa using the injector Characteristics of dry nitrogen B 330 N2 adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 55: ...components ATH 2300 M MT Operating Manual Detailed contents F F 000 Spare parts Instructions of use Replacement of parts and use of non genuine parts F 100 First level maintenance parts adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 56: ...genuine jeopardizes the initial safety conditions of the equipment In such cases the EC declaration of conformity becomes null The manufacturer withdraws responsibility for such operations Besides counterfeiting and unfair trading of parts are condemned under civil and criminal laws The manufacturer urges the user not to use imitation parts or the misappropriation and pirating of intellectual prop...

Страница 57: ... V DC 038066 Dust filter Replace regularly the dust filter when used in dusty air P N Dust filter 106229 A complete range of connecting accessories is available in the manufacturer s catalogue flanges fittings Water valve coil P N Coil 24 V DC 108667 adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 58: ...GB 01743 Edition 03 Nov 12 1 1 Appendix ATH 2300 M MT Operating manual Detailed contents G G 150 Pumping curves G 200 Service adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 59: ... Speed Curves 0 200 400 600 800 1000 1200 1400 1600 1800 10 5 10 4 10 3 10 2 10 1 10 0 10 1 PUMPING SPEED ATH2300M DN200 VPumping speed l s Inlet pressure hPa Cold pump 20 C 31000 RPM without inlet screen N 2 He H 2 Ar adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 60: ...SPEED ATH2300M DN250 0 500 1000 1500 2000 2500 10 5 10 4 10 3 10 2 10 1 10 0 10 1 VPumping speed l s Inlet pressure hPa N 2 He H 2 Ar Cold pump 20 C 31000 RPM without inlet screen ATH 2300 M DN250 Pumping Speed Curves adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 61: ...Pumping curves ATH 2300 M Flow curves 1 10 100 1000 10000 1 E 05 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 N2 H2 Flow rate sccm Upper limites for continuous operation Inlet pressure hPa adixen Vacuum Products Operating instructions ATH 2300 M MT ...

Страница 62: ...they are contaminated with micro biological explosive or radioactive substances Hazardous substances are substan ces and compounds in accordance with the hazardous goods regulations current version Neutralize the pump by flushing it with nitrogen or dry air Close all openings airtight Seal the pump or device in suitable protective film Return the pump device only in a suitable and sturdy transport...

Страница 63: ...how and our portfolio of training opportunities We support you with your plant layout and provide opportunities We support you with your plant layout and provide first class on site service worldwide first class on site service worldwide Vacuum Solutions Vacuum Solutions from a single Source from a single Source Are you looking for a Are you looking for a perfect vacuum solution perfect vacuum sol...

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