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OPERATING MANUAL

DFC MASS FLOW CONTROLLER

Technical Data Sheet No. TD9805M Rev. O

Date of Issue: February 2012

aalborg

20 CORPORATE DRIVE

ORANGEBURG, NY 10962

PHONE: 845.770.3000

FAX: 845.770.3010

e-mail: [email protected]

toll free in usa or canada: 1.800.866.3837

web site: www.aalborg.com

Содержание DFC

Страница 1: ...Technical Data Sheet No TD9805M Rev O Date of Issue February 2012 aalborg 20 CORPORATE DRIVE ORANGEBURG NY 10962 PHONE 845 770 3000 FAX 845 770 3010 e mail info aalborg com toll free in usa or canada...

Страница 2: ...This product is not intended to be used in life support applications CAUTION K Factors at best are only an approximation K Factors should not be used in applications that require accuracy better than...

Страница 3: ...2 Flow Signal Output Readings 5 3 Swamping Condition 5 4 Set Point Reference Signal 5 5 Valve OFF Control 5 6 Valve Open Purge 5 7 Analog Interface Configuration 6 MAINTENANCE 3 6 1 Introduction 6 2 F...

Страница 4: ...M APPENDIX 2 GAS FACTOR TABLE K FACTORS APPENDIX 3 DIMENSIONAL DRAWINGS APPENDIX 4 SENDING COMMANDS TO THE DFC APPENDIX 5 SDPROC TABLES GAS INDEPENDENT VARIABLES GAS DEPENDENT VARIABLES APPENDIX 6 WAR...

Страница 5: ...will not be accepted Aalborg7 reserves the right to charge a fee to the customer for equipment returned under warranty claims if the instruments are tested to be free from warrantied defects Shipping...

Страница 6: ...ndard 1 4 inch DFC 26 and 36 or 3 8 inch DFC 46 or optional 1 8 inch inlet and outlet compression fittings which should not be removed unless the meter is being cleaned or calibrated for a new flow ra...

Страница 7: ...dapter Settings for the receiver circuit usually should follow the selection made for the transmitter circuit in order to eliminate Echo Pin 11 of the D connector has to be connected to T or R on the...

Страница 8: ...4 FIGURE b 1 WIRING DIAGRAM FOR DFC TRANSDUCERS...

Страница 9: ...re are how ever some connectors with nonconforming patterns and the numbering sequence on your mating connector may or may not coincide with the numbering sequence shown in our pin configuration table...

Страница 10: ...ial is detected by the electronic control circuit The measured gradient at the sensor windings is linearly proportional to the instantaneous rate of flow tak ing place An output signal is generated th...

Страница 11: ...id for DFC46 GAS AND AMBIENT TEMPERATURE 32 F F to 122 F F 0 F C to 50 F C 14 F F to 122 F F 10 F C to 50 F C Dry gases only RELATIVE GAS HUMIDITY Up to 70 MAXIMUM INTERNAL LEAK 0 5 FS LEAK INTEGRITY...

Страница 12: ...DFC26 or 3 8 DFC26 DFC36 compression fittings or 1 4 DFC26 DFC36 VCR7 fittings are optional TRANSDUCER INTERFACE CABLE Flat cable with 25 pin D connectors on the ends is standard Optional shielded cab...

Страница 13: ...Nitrogen at STP conditions i e 70 F F 21 1 F C at 1 atm For other gases use the K factor as a multiplier from APPENDIX 2 9 CODE scc min N2 CODE std liters min N2 01 0 to 10 07 0 to 1 02 0 to 20 08 0...

Страница 14: ...psid mbar DFC 26 up to 10 720 1 06 75 DFC 36 15 2630 3 87 266 20 1360 2 00 138 30 2380 3 50 241 40 3740 5 50 379 50 5440 8 00 551 DFC 46 60 7480 11 00 758 100 12850 18 89 1302 MODEL WEIGHT SHIPPING W...

Страница 15: ...be sure that the CHANNEL selector switch is set to the correct channel Analog output flow signals of 0 to 5 VDC or optional 4 to 20 mA are attained at the appropriate pins the 25 pin D connector see F...

Страница 16: ...closed Conversely when the pin is disconnected from 0 VDC floating the solenoid valve will remain active The simplest means for utilizing the VALVE OFF control feature is to connect a toggle switch b...

Страница 17: ...e metered Since the RTD sensor consists in part of a small cap illary stainless steel tube it is prone to occlusion due to impediments or gas crys tallization Other flow passages are also easily obstr...

Страница 18: ...m the inlet connection The 50 micron filter screen will now become visible Push the screen out through the inlet fitting Clean or replace each of the removed parts as necessary If alcohol is used for...

Страница 19: ...the closed position Apply an inlet pressure of 5 psig and atmospheric pressure at the outlet If a small flow occurs turn the set screw on top of the solenoid valve clockwise until the flow through th...

Страница 20: ...tered nitrogen gas or other suitable reference gas The gas and ambient temperature as well as inlet and outlet pressure conditions should be set up in accordance with actual operating conditions 7 2 C...

Страница 21: ...ply correctly selected according to requirements When several meters are used a power supply with appropriate current rating should be selected Were the connector pinouts matched properly When interch...

Страница 22: ...y appropriate gas pressure flush clean or disassemble to remove impediments or replace signal and power supply commons are different apply appropriate gas pressure check cables and all connections or...

Страница 23: ...tal installation relative to the sensor tube re adjust valve section 6 2 4 return to factory for replacement check cable and connectors or replace decrease pressure to correct level adjust appropriate...

Страница 24: ...NCE GASES The calibration conversion incorporates the K factor The K factor is derived from gas density and coefficient of specific heat For diatomic gases K Kgas Note in the above relationship that d...

Страница 25: ...APPENDIX 1 COMPONENTS DIAGRAMS 21 DFC Digital PC Board Primary Side...

Страница 26: ...APPENDIX 1 CONTINUED 22 DFC Digital PC Board Secondary Side...

Страница 27: ...APPENDIX 1 CONTINUED 23 DFC Analog PC Board Primary Side...

Страница 28: ...APPENDIX 1 CONTINUED 24 DFC Analog PC Board Secondary Side...

Страница 29: ...romethane Freon 13 B1 CBrF3 3697 1113 6 644 1 3 Butadiene C4H6 3224 3514 2 413 Butane C4H10 2631 4007 2 593 1 Butene C4H8 2994 3648 2 503 2 Butene C4H8 CIS 324 336 2 503 2 Butene C4H8 TRANS 291 374 2...

Страница 30: ...Ethyl Chloride C2H5Cl 3891 244 2 879 Ethylene C2H4 60 365 1 251 Ethylene Oxide C2H4O 5191 268 1 965 Fluorine F2 9784 1873 1 695 Fluoroform Freon 23 CHF3 4967 176 3 127 Freon 11 CCl3F 3287 1357 6 129 F...

Страница 31: ...e CH3Cl 6299 1926 2 253 Methyl Fluoride CH3F 68 3221 1 518 Methyl Mercaptan CH3SH 5180 2459 2 146 Methyl Trichlorosilane CH3 SiCl3 2499 164 6 669 Molybdenum Hexafluoride MoF6 2126 1373 9 366 Monoethyl...

Страница 32: ...35 1592 6 516 Sulfuryl Fluoride SO2F2 3883 1543 4 562 Tetrafluoroethane Forane 134A CF3CH2F 5096 127 4 224 Tetrafluorohydrazine N2F4 3237 182 4 64 Trichlorofluoromethane Freon 11 CCl3F 3287 1357 6 129...

Страница 33: ...DIMENSIONAL DRAWINGS DFC 26 Mass Flow Controller NOTES Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please co...

Страница 34: ...30 DFC 36 46 Mass Flow Controller NOTES Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact Aalborg7...

Страница 35: ...hexadecimal 00 through FF are valid Cmd The one or two character command from the table above Arg1 to Arg4 The command arguments from the table above Multiple arguments are comma delimited CR Carriag...

Страница 36: ...32...

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Страница 40: ...36...

Страница 41: ...s uint Misc Options 6 AOutOffset_mA int 7 AddressRS485 char 3 Two character address for RS485 only 8 AInScaleV float 9 AInOffsetV float 10 AInScale_mA float 11 AInOffset_mA float 12 AoutScaleV float 1...

Страница 42: ...4 ValveTbl 2 valve value uint Do Not Alter 45 ValveTbl 3 flow float Do Not Alter 46 ValveTbl 3 valve value uint Do Not Alter 47 ValveTbl 4 flow float Do Not Alter 48 ValveTbl 4 valve value uint Do Not...

Страница 43: ...Tbl 0 Sensor Value uint Index 0 Must be 120 zero value 114 SensorTbl 0 Flow float Index 0 Must be 0 0 zero PFS 115 SensorTbl 1 Sensor Value uint A D value from sensor 116 SensorTbl 1 Flow float Actual...

Страница 44: ...Value uint 130 SensorTbl 8 Flow float 131 SensorTbl 9 Sensor Value uint 132 SensorTbl 9 Flow float 133 SensorTbl 10 Sensor Value uint 134 SensorTbl 10 Flow float Flow in PFS Should be 1 0 135 136 137...

Страница 45: ...and to equipment and it is deemed the responsibility of the customer that only operators with basic knowledge of the equipment and its limitations are permitted to control and operate the equipment c...

Страница 46: ...g7 Instruments Buna7 is a registered trademark of DuPont Dow Elastometers Kalrez7 is a registered trademark of DuPont Dow Elastomers VCR7 is a registered trademark of Swagelok Marketing Co Viton7 is a...

Страница 47: ...ves the right to make changes to information and specifications in this manual without notice Copyright 2001 Aalborg Instruments All rights reserved EUROPEAN SERVICE FACILITY Authorized Repair and Ser...

Страница 48: ...ndard or High Precision PTFE Chemically Inert Needle or Metering Proportionating Solenoid Stainless For Controlling Gas or Liquid Flow Pulse width Modulated SMV Stepping Motor Valve VALVES ROTAMETERS...

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