Zeiss MultiSEM 505 Series User Manual Download

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Instruction Manual

Carl Zeiss Microscopy - Electron and Ion Beam Microscopy

Plasma Cleaner Add On

Integration Pack for MultiSEM

Enabling the Nano-Age World®

Summary of Contents for MultiSEM 505 Series

Page 1: ...Instruction Manual Carl Zeiss Microscopy Electron and Ion Beam Microscopy Plasma Cleaner Add On Integration Pack for MultiSEM Enabling the Nano Age World...

Page 2: ...val system Violations will be prosecuted The use of general descriptive names registered names trademarks etc in this document does not imply even in the absence of a specific statement that such name...

Page 3: ...Description 10 3 1 Overview 10 3 2 Principle of operation 11 3 3 Technical data 12 3 4 Customer service 13 4 Installation 13 5 Operation 14 5 1 Switching on the Plasma Cleaner Add On 14 5 2 Switching...

Page 4: ...Q OO m j pbj K...

Page 5: ...ultiSEM workstation Reference to related documents For detailed information regarding the MultiSEM workstation and the operating software refer to the Zeiss MultiSEM Instruction Manual Safety instruct...

Page 6: ...pe Ctrl Alt Del Simultaneously type CTRL key ALT key and DEL key on the keyboard Click on the tab Plasma Cleaner Control Select Object Chamber from the drop down list Icons buttons and menus are print...

Page 7: ...to operate the workstation Basic operator Person who has been trained to perform fundamental operation sequences Specially trained operator Electrically skilled person who has been trained to perform...

Page 8: ...with unwanted hydrocarbons This is useful for Fast specimen decontamination Decontamination time can be adjusted to fit the customer needs Typically 2 5 minutes to clean the sample or 10 30 minutes ru...

Page 9: ...On is used continuously over several hours the grease of the stage can get affected by loosing its lubricious properties Cleaning type Conditions Turbo Plasma pressure power T pump is 0 02 mbar Igniti...

Page 10: ...manual and the entire user documentation delivered with the workstation You will find the user documentation in the document folder CAUTION Risk of property damage due to improper maintenance service...

Page 11: ...ription 3 1 Overview Fig 1 1 Operation principles of the Plasma Cleaner Add On 1 Electron column 5 Specimen stage 2 Vacuum exhaust 6 Plasma 3 High vacuum pump 7 Plasma radical source PRS 4 Reactive ga...

Page 12: ...tabilizing the pressure close to the PRS in the chamber to the preset ignition pressure After ignition the PRS stabilizes the pressure to the preset plasma pressure value When the preset plasma time i...

Page 13: ...2 Installation category II Electrical supplies Connected to power supply Specifications of the Plasma Cleaner Add On electronics Rise time 50 ns 10 to 90 Decay time 50 ns 90 to 10 Delay time 250 ns 50...

Page 14: ...cal Carl Zeiss service engineer A list of Carl Zeiss Microscopy locations and authorised service partners can be found at http www zeiss com microscopy 4 Installation The Plasma Cleaner Add On is eith...

Page 15: ...e on page 9 Important Depending on the specimen material it is possible that the Plasma Cleaner Add On mightdamage the specimen It is recommended to test this before clean ing important specimens 2 To...

Page 16: ...n of the plasma may take several minutes If the Plasma Cleaner in the Plasma Cleaner Control menu is not connected check if the power supply of the plasma cleaner control unit is on If not switch powe...

Page 17: ...e of a defect contact your local Carl Zeiss Microscopy service engineer for assistance 6 2 Troubleshooting For detailed information refer to the XEI Manual If you cannot solve the problem contact your...

Page 18: ...ation and disposal for Plasma Cleaner Add On can be looked up in the original manual from XEI Evactron 25Z 40Z 45Z De Contaminator RF Plasma Cleaning System 8 Abbreviations PRS Plasma Radical Source m...

Page 19: ...tching on the Beam Blanker 14 T Technical data 12 Troubleshooting 17 Typography 6 U User 7 Numerics 75026 Z3 3_headline_3 2 1 1 Recommended cleaning processes 9 A Abbreviations 18 About this manual 5...

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Page 22: ...dge Cambridgeshire CB1 3JS UK microscopy zeiss com Carl Zeiss Microscopy LLC One Zeiss Drive Thornwood NY 10594 USA microscopy zeiss com Plus a worldwide network of distributors www zeiss com microsco...