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3.3. Technical data
The Plasma Cleaner Add On consists of two major components:
•
Plasma Radical Source (PRS)
•
Controller
These components are connected by a cable bundle.
Environmental requirements
Pollution degree
2
Installation category
II
Electrical supplies
Connected to power supply
Specifications of the Plasma Cleaner Add On electronics
Rise time
< 50 ns (10% to 90%)
Decay time
< 50 ns (90% to 10%)
Delay time
250 ns ± 50 ns
Repetition rate
Nominal frequency 200 kHz; maximum 1 MHz for 30 s
Control
ZEN mSEM V1.02 or higher
Fully integrated starting from ZEN mSEM
.NET Framework 4.5 Client Pro-
file
Precondition to work with the Plasma Cleaner Add On
