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5. Operation
IMPORTANT
For detailed information about the Plasma Cleaner, refer to the XEI Manual.
Procedure
1
If there are several plasma cleaners
attached to the MultiSEM (object chamber
and/or load lock), the plasma cleaner for the
desired cleaning process can be chosen in
the first line of the ZEN menu
Plasma
Cleaner Control
.
Note
It is only possible to run one plasma cleaner
at a time.
Before starting the plasma cleaning process
choose
Ignition pressure
,
Plasma pres-
sure
,
Plasma time
and
Plasma power
according to your desired cleaning process
(see table on page 9).
Important
Depending on the specimen material, it is
possible that the Plasma Cleaner Add On
mightdamage the specimen.
It is recommended to test this before clean-
ing important specimens.
2
To start the plasma cleaning process press
Start cleaning
.
By starting the cleaning process the
Plasma
Cleaner Control
is enabled, the correspond-
ing chamber is vented and pumped down
again.
When reaching the selected
Ignition pres-
sure
, the pressure is stabilized by the
plasma cleaner, the radio frequency (RF) is
switched on automatically and, after some
seconds normally, the plasma ignites.
When reaching the selected
Plasma time
the plasma switches off and pump down for
the corresponding chamber is continued.
4
With
Stop cleaning
the cleaning process
can be stopped in advance.
