3-24
IM AQ6376E-02EN
Note
When the AQ6376E is shipped from the factory, a resin tube is attached to the PURGE GAS IN and PURGE
GAS OUT terminals to prevent dust from entering the inside.
When installing required equipment and components, remove this resin tube.
AQ6376E
Resin tubing
The recommended purge gas flow rate into the AQ6376E is 15 to 20 SCFH (7 to 9.5 L/min).
The figure below shows the purge efficiency by 20 SCFH pure nitrogen gas flow rate.
Purge efficiency of the AQ6376E
1.0
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0.0
0.00
0.30
1.00
1.30
2.00
Elapsed time [hour]
3.6 Purge
