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Appendix
IM 735201-01E
App-1
Appendix 1 Table of NA Correction Coefficients
Use this table when setting the numerical aperture (see section 3.1.2). You can
correct the angle dependency of the light accepted by the sensor head
resulting from the aperture. This section includes seven different NA correction
coefficient tables based on wavelength and NA. Contact your nearest
Yokogawa representative if none of the correction tables below match your
conditions.
The horizontal axis is S polarization (perpendicular to the plane of polarization)
and the vertical axis is P polarization (parallel to the plane of polarization).
Wavelength: 405 nm, NA = 0.65
Wavelength: 405 nm, NA = 0.85
RIM
30%
35%
40%
45%
50%
55%
60%
65%
70%
75%
80%
85%
90%
95%
30%
1.148 1.148 1.149 1.149 1.149
1.15
1.15
1.15
1.15
1.151 1.151 1.151 1.151 1.151
35%
1.153 1.153 1.153 1.153 1.154 1.154 1.154 1.154 1.155 1.155 1.155 1.155 1.155 1.155
40%
1.157 1.157 1.157 1.157 1.158 1.158 1.158 1.158 1.158 1.158 1.159 1.159 1.159 1.159
45%
1.161 1.161 1.161 1.161 1.161 1.161 1.162 1.162 1.162 1.162 1.162 1.162 1.162 1.162
50%
1.164 1.164 1.164 1.165 1.165 1.165 1.165 1.165 1.165 1.165 1.165 1.165 1.165 1.165
55%
1.167 1.167 1.168 1.168 1.168 1.168 1.168 1.168 1.168 1.168 1.168 1.168 1.168 1.168
60%
1.17 1.171 1.171 1.171 1.171 1.171 1.171 1.171 1.171 1.171 1.171 1.171 1.171 1.171
65%
1.173 1.173 1.173 1.174 1.174 1.174 1.174 1.174 1.174 1.174 1.174 1.174 1.174 1.174
70%
1.176 1.176 1.176 1.176 1.176 1.176 1.176 1.176 1.176 1.176 1.176 1.176 1.176 1.176
75%
1.179 1.179 1.179 1.179 1.179 1.179 1.179 1.179 1.179 1.179 1.179 1.179 1.179 1.178
80%
1.181 1.181 1.181 1.181 1.181 1.181 1.181 1.181 1.181 1.181 1.181 1.181 1.181 1.181
85%
1.184 1.184 1.183 1.183 1.183 1.183 1.183 1.183 1.183 1.183 1.183 1.183 1.183 1.183
90%
1.186 1.186 1.186 1.186 1.186
1.186 1.185 1.185 1.185 1.185 1.185 1.185 1.185 1.185
95%
1.188 1.188 1.188 1.188 1.188 1.188 1.187 1.187 1.187 1.187 1.187 1.187 1.187 1.187
RIM
30%
35%
40%
45%
50%
55%
60%
65%
70%
75%
80%
85%
90%
95%
30%
1.302 1.302 1.302 1.302 1.302 1.302 1.302 1.302 1.302 1.302 1.302 1.302 1.301 1.301
35%
1.312 1.312 1.312 1.312 1.312 1.312 1.311 1.311 1.311 1.311 1.311 1.311 1.311
1.31
40%
1.321 1.321 1.321 1.321 1.321
1.32
1.32
1.32
1.32
1.32
1.319 1.319 1.319 1.319
45%
1.33
1.33 1.329 1.329 1.329 1.328 1.328 1.328 1.328 1.327 1.327 1.327 1.327 1.326
50%
1.338 1.337 1.337 1.337 1.336 1.336 1.336 1.335 1.335 1.335 1.334 1.334 1.334 1.333
55%
1.345 1.345 1.344 1.344 1.343 1.343 1.343 1.342 1.342 1.341 1.341 1.341
1.34
1.34
60%
1.352 1.352 1.351 1.351
1.35
1.35
1.349 1.349 1.348 1.348 1.347 1.347 1.347 1.346
65%
1.359 1.358 1.358 1.357 1.356 1.356 1.355 1.355 1.354 1.354 1.353 1.353 1.353 1.352
70%
1.365 1.364 1.364 1.363 1.362 1.362 1.361 1.361
1.36
1.36
1.359 1.359 1.358 1.358
75%
1.371 1.37
1.37
1.369 1.368 1.368 1.367 1.366 1.366 1.365 1.365 1.364 1.364 1.363
80%
1.377 1.376 1.375 1.374 1.374 1.373 1.372 1.372 1.371
1.37
1.37
1.369 1.369 1.368
85%
1.382 1.381 1.381
1.38
1.379 1.378 1.377 1.377 1.376 1.376 1.375 1.374 1.374 1.373
90%
1.388 1.387 1.386 1.385 1.384 1.383 1.382 1.382 1.381
1.38
1.38
1.379 1.379 1.378
95%
1.393 1.392 1.391
1.39
1.389 1.388 1.387 1.387 1.386 1.385 1.384 1.384 1.383 1.383