5
Basic Specifications
5.2 Manipulator Clean Specifications
5-2
179394-1CD
HW1483905
MFL15D-875/-1600
5.2
Manipulator Clean Specifications
5.3
Part Names and Working Axes
Fig. 5-1: Part Names and Working Axes
The manipulator conforms to ISO cleanliness class 4
1)
.
1 Under the condition that the manipulator is in the downflow of 0.4 m/s or more
in a vertically rectified state. The parts higher than the wrist flange are
applicable.
L+
S+
R+
R-
L-
U+
U-
S-
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