VAT 655 Series Installation, Operating, & Maintenance Instructions Download Page 10

Page: 10 / 112

DESCRIPTION OF PRODUCT

Series 655

10/112

Edition 23.09.2019

979645EA

Description

DN 250

10"

(65548 - ....)

Max. differential pressure on plate during isolation

1200 mbar in either direction

Max. differential pressure on plate
during opening and throttling

5 mbar

Min. controllable conductance

molecular flow)

Typ. 2 l/s

Dimensions

Refer to dimensional drawing of specific valve ordering number

(available on request)

Summary of Contents for 655 Series

Page 1: ...he valve ordering number s 65548 GQ 2 sensor inputs analog outputs 65548 AQ 2 sensor inputs analog outputs 15V SPS 65548 HQ 2 sensor inputs analog outputs PFO 65548 CQ 2 sensor inputs analog outputs 1...

Page 2: ...duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for u...

Page 3: ...ening torque 20 4 3 1 Mounting with centering rings 21 4 3 2 Mounting with O ring in grooves 21 4 3 3 Admissible forces 22 4 3 4 Requirements to sensor connection 23 4 4 Electrical connection 24 4 4 1...

Page 4: ...Display information 77 5 6 1 Power up 77 5 6 2 Operation 78 5 6 3 Error 78 5 7 Safety mode 78 5 8 Operation during power up 79 5 9 Behavior in case of power failure 79 5 10 Operation under increased...

Page 5: ...Series 655 979645EA Edition 23 09 2019 5 112 12 1 2 Controller 110 12 1 3 Accessories 110 13 Appendix 111...

Page 6: ...pressure control applications Use product for clean and dry vacuum applications only Other applications are only allowed with the written permission of VAT 1 3 Used abbreviations Abbreviation Descrip...

Page 7: ...ER connector SENSOR Actuator type Stepper motor with servo control Ingress Protection IP30 Sensor input Signal input voltage ADC resolution Sampling time 10 10 V Ri 100 k 0 1 mV 2 ms connector SENSOR...

Page 8: ...sition control capability 58000 steps full stroke Closing time throttling only full stroke 0 9 s typ 0 5 s typ Opening time throttling only full stroke 0 9 s typ 0 5 s typ Closing time throttling isol...

Page 9: ...00 unheated and under clean conditions 1 000 000 unheated and under clean conditions Admissible operating temperature 10 C to 120 C Mounting position horizontally only Wetted materials Body 655 A Alum...

Page 10: ...differential pressure on plate during isolation 1200 mbar in either direction Max differential pressure on plate during opening and throttling 5 mbar Min controllable conductance N2 molecular flow Typ...

Page 11: ...tion Operating Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system They must be stored together with the other documentation and acc...

Page 12: ...ions WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work 2 4 Safety labels Label Part...

Page 13: ...Series 655 DESIGN AND FUNCTION 979645EA Edition 23 09 2019 13 112 3 Design and Function 3 1 Design symbol picture...

Page 14: ...IC2 calculates the required gate position to achieve the set point pressure Actuation is performed by 2 stepper motors one for pendulum and the second for stroke An encoder monitors the position This...

Page 15: ...differences Example Downstream control 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable 6 Controller and actuator 7 Cable to remote control unit 8 Cable to power supply 9 HV Pu...

Page 16: ...s is admitted at the same time the pressure can be controlled in two ways 1 Downstream control standard The pressure is controlled by changing the conductance of a control valve between pump and proce...

Page 17: ...cal overstraining Use a crane to lift valves DN 200 8 and larger Make sure that the supplied products are in accordance with your order Inspect the quality of the supplied products visually If it does...

Page 18: ...rect handling Only qualified personal are allowed to install the valve into the vacuum system NOTICE Wrong connection Wrong connection may result in damage of controller or power supply Connect all ca...

Page 19: ...he valve with space for dismantling and air circulation as shown in figure below 4 2 2 Connection overview System 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable s 6 Actuator...

Page 20: ...oil under screw head 2 is bigger than 0 12 Lower friction coefficients may damage the valve as the resulting preload force gets too high Therefore for other friction coefficients the torque needs to b...

Page 21: ...20 13 15 hole depth mm hole depth inch DN250 10 65548 16 0 63 4 3 2 Mounting with O ring in grooves Valve size ISO F JIS ASA LP ISO F JIS ASA LP max tightening torque Nm max tightening torque lbs ft...

Page 22: ...ation and malfunctioning of the valve Do not higher force the valve body as specified The following forces are admissible Valve size Axial tensile or compressive force FA Bending moment M N lb Nm lbf...

Page 23: ...owing requirements Inner diameter of connection pipe 10 mm Length of connection pipe 300 mm These conductance guidelines must include all valves and limiting orifices that may also be present Make als...

Page 24: ...spark Connector pins or electronic parts could damage if plugged and unplugged under power Do not plug or unplug connectors under power 4 4 1 Ground connection The connection point at chassis FE must...

Page 25: ...ternal 15 VDC supplied to POWER connector is feedthrough to SENSOR connector to supply 15 VDC sensors Refer to chapter Power and sensor connection 15 VDC sensors without optional SPS module for schema...

Page 26: ...way from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 24V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws wit...

Page 27: ...ay from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws with 4 4...

Page 28: ...away from noise sources Connect Power supply 24 GND and GND 15V 15V at DA 15 male power connector and Sensors 15V 15V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connect...

Page 29: ...locate it away from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only scr...

Page 30: ...way from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 15V 15V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws...

Page 31: ...In addition there are 2 digital inputs and 2 digital outputs Digital inputs may be operated either by switches or by voltage sources Active digital inputs have higher priority than DeviceNet commands...

Page 32: ...INSTALLATION Series 655 32 112 Edition 23 09 2019 979645EA 4 4 3 2 Power connector Configuration with voltage source for digital inputs...

Page 33: ...itched off The function can be set to function INTERLOCK CLOSE INTERLOCK CLOSE has priority over INTERLOCK OPEN 14 INPUT COMMON Common for all digital inputs See also 4 4 3 4 Digital output Pin Functi...

Page 34: ...CAN_L Blue DeviceNet signal The DeviceNet interface is galvanic isolated from control unit 4 4 4 1 Micro Connector Pinout Male pins at valve controller Female sockets at DeviceNet cable 4 4 5 Service...

Page 35: ...et Baud rate and Address for valve must be selected Refer to chapter Interface configuration DeviceNet for details 4 SENSOR CONFIGURATION Basic configurations of the valve must be adapted according to...

Page 36: ...es when the valve performs the homing procedure Standard Do homing after restart if valve is not in sealed state Open Command Do homing on an open command Move Command Do homing on any move command At...

Page 37: ...y in Pressure Controller Object Class ID 100 4 6 3 Digital I O On the power connecter there are two digital inputs and two digital outputs available See chapter Power and sensor connection to get more...

Page 38: ...in the unit of Range Data Unit Example for a 250mTorr linear sensor Upper Limit 250 0 Lower Limit 0 0 Range Upper Limit Voltage Value Range Lower Limit Voltage Value These parameters are only used for...

Page 39: ...both sensors need to fit together in the crossover area otherwise crossover effect result nonlinearity Therefore sensor ratio should not be too high about 100 Crossover Mode Hard Switch Switching betw...

Page 40: ...e zero adjust Sensor x Offset Value SFS 0 0 Sensor 1 Enable Sensor 2 Enable 0 It s not possible to execute a zero adjust A present offset value is ignored 1 It s possible to execute a zero adjust A pr...

Page 41: ...plications do not need more than one controller units But if the result of the pressure control does not meet the expectations the different controller units can be an option for optimization With the...

Page 42: ...can be reduced But control response time will be slowed down by this measure Learn Data Selection There are up to 4 different learn data sets available Select which Learn Data set the adaptive contro...

Page 43: ...vailable Tv 500 sec Tv 500 sec Adaptive pressure controller Fixed pressure controller Fixed pressure controller Soft Pump Soft Pump Use the formula below to define the applicable pressure control algo...

Page 44: ...re versus valve position data table This table is used to adapt the PID parameters The data table is stored in the device memory which is power fail save The data table can be up downloaded via Contro...

Page 45: ...open Bit 7 Learn procedure terminated by program Bit 8 Pressure 0 at open position no gas flow set Parameter location CPA DEVICENET Pressure Control Adaptive Learn Limited access in S Single Stage Con...

Page 46: ...CWP required conductance of working point l s qWP gasflow of working point sccm pWP pressure of working point Torr 2 Out of these calculated conductance values choose the lowest CR required lower cond...

Page 47: ...ze over undershoot of pressure 5 10 15 20 25 0 5 10 15 pressure time New Target Pressure without pressure ramp Actual Pressure Target Pressure Target Pressure Used ramp 5 10 15 20 25 0 5 10 15 pressur...

Page 48: ...parameter value Ramp Time Ramp Time is a value in the unit seconds After setting a new Target Pressure Target Pressure Used will converge the Target Pressure in the slope defines in parameter Ramp Slo...

Page 49: ...ance with fixed PI pressure controller Tuning of control pressure performance with Soft pump refer to chapter Tuning of control performance with soft pump pressure controller 4 8 5 1 Tuning of control...

Page 50: ...or connection Sensor delay adjustment Sensor delay adjustment effects Stability Adjustment range is from 0 to 1 0s Pipes and orifices for sensor attachment delay response time and so badly impact pres...

Page 51: ...la depending on units you are familiar with t Setpoint Ramp Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure...

Page 52: ...e OPEN and CLOSE are always done with maximum speed Adjustment procedure 1 Use optimal gain factor sensor delay time and setpoint ramp according to preceding tuning steps 2 Open valve 3 Control a typi...

Page 53: ...me constant the adaptive control mode does not provide satisfying control performance In PI controller mode the parameters P gain and I gain have to be set according to the systems characteristics The...

Page 54: ...pressure is stable Set pressure to SP1 If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all the P gain is too high If there is no over shoot...

Page 55: ...n results in a slow asymptotical pressure rise and there is still a constant deviation to SP2 the I gain is too low The optimal value for I gain is found if the transition from SP2 to SP1 result in ju...

Page 56: ...ated for PI controller mode When switching to pump down control mode the P gain value evaluated for the PI controller has to be send to the valve controller When switching back into PI controller mode...

Page 57: ...ressure set point is 510 Torr At each new interval exceeding 10 sec send the new pressure set point Repeat until process pressure is achieved While pumping down chamber pressure and valve position sho...

Page 58: ...ols Create Diagnostic File in Control Performance Analyzer and save file Pressure flow gas conditions to be controlled Chamber volume Pumping speed l s and pump type e g turbo pump System description...

Page 59: ...baudrate can be selected by a rotary switch which is also on the panel If a valid baudrate is selected 125kBaud 250kBaud 500kBaud the rate will be used and stored in the device memory as actual baudr...

Page 60: ...e values Instance A specific and real physical occurrence of an object For example New Zealand is an instance of the object class Country The terms Object Instance and Object Instance all refer to a s...

Page 61: ...protocol information Explicit messaging connections utilize a direct request response format which allow you to access any attribute data Explicit messaging is typically used for the setup configurati...

Page 62: ...Request Messages to the appropriate handler object 3 Device Net 1 Provides the configuration and status of a DeviceNet port 4 Assembly 7 Input 3 Output Groups attributes of multiple objects into a sin...

Page 63: ...DeviceNet interface 1 This command resets the DeviceNet interface to factory default settings Note All previously done configurations will be overwritten 4 10 5 Assembly Object Class ID 4 Groups attri...

Page 64: ...CONTROLLER MODE ACCESS MODE 0 1 3 5 6 1 2 2 1 1 7 0 1 5 9 10 1 4 4 1 1 11 101 65h EXCEPTION STATUS PRESSURE POSITION VALVE CLOSED OPEN CHECK 2 CONTROLLER MODE 0 1 3 5 6 1 2 2 1 1 7 0 1 5 9 10 1 4 4 1...

Page 65: ...instance number of the assembly used by the poll connection to receive data data from valve to host BIT STROBE INPUT Not implemented CHANGE OF STATE CYCLING INPUT Set 16 5 4 101 1 X Get 14 X input as...

Page 66: ...le for all executing commands Note A successfully established Poll IO connection switches the DEVICE STATUS to executing EXECUTING START 6 48 1 3 This command changes the DEVICE STATUS to executing st...

Page 67: ...0 0 0 7 PCV Device Exception Detail Byte 3 0 0 0 0 0 0 0 0 8 Manufacturer Exception Detail Size 0 0 0 0 0 1 1 0 9 Manufacturer Exception Detail Byte 0 Warning Reserved Reserved External isolation valv...

Page 68: ...ata sets which need to be downloaded separately Example Send 00000754241 48 48 48 48 48 55 53 52 50 52 49 Response 000 48 48 48 4 10 9 S Analog Sensor Object Class ID 49 Models the acquisition of a re...

Page 69: ...re 9 sensor 1 high sensor 2 low crossover switch point 3 sensor 2 4 sensor 2 high sensor 1 low crossover fade 8 sensor 2 high sensor 1 low crossover target pressure 10 sensor 2 high sensor 1 low cross...

Page 70: ...nstance 1 pressure Target pressure nominal pressure range is 0 10 000 sensor full scale But it may be scaled refer also to command GAIN for details X Instance 2 position Target position nominal positi...

Page 71: ...arn adaptive control algorithm for correct learn gas flow and procedure LEARN PRESSURE LIMIT calibration scale Set 16 51 1 100 2 integer 4 float X Get 14 X learn pressure limit according to selected D...

Page 72: ...eNet 2 Locked remote no access from service port THROTTLE CYCLE COUNTER Get 14 100 1 101 4 X X Data type is unsigned long integer A movement from max throttle position to open back to max throttle pos...

Page 73: ...cture on the following page for details SENSOR 2 READING Get 14 100 1 109 2 integer 4 float Nominal range is 0 10 000 but it may be scaled Refer also to command GAIN and picture on the following page...

Page 74: ...alled complete into the system 5 1 Normal operation This valve is designed for pressure control in vacuum chambers It can be employed in a pressure control mode or a position control mode In both case...

Page 75: ...and maintenance How to start 1 Connect service cable USB A B cable male male between PC and valve A drive opens 2 Double Click on CPA exe to open the Control Performance Analyzer 3 Click Local for Loc...

Page 76: ...t Local operation CPA Remote operation Refer to chapter Device Net interface Use target position control Explicit Set EXECUTING in S Device Supervisor if not already done Set SETPOINT TYPE in S Single...

Page 77: ...it 1 Digit 2 Digit 3 Digit 4 1st Power On All dots are illuminated 2nd Valve series e g 67 0 6 7 0 3rd Firmware generation type e g 01 0C 0 1 0 C 4th Firmware version firmware e g 07 00 0 7 0 0 5th Co...

Page 78: ...e By means of an external switch see connection diagrams Electrical connection the motor power supply can be interrupted In this case the valve enters the safety mode This motor interlock prevents the...

Page 79: ...ition after homing is closed 5 9 Behavior in case of power failure Valve position before power failure Reaction of valve Without Power Failure Option PFO 655 G 655 A 655 T 655 V With Power Failure Opt...

Page 80: ...em await until the valve is cooled down complete before doing any work This valve may be operated in the temperature range mentioned in chapter Technical data 5 11 Behavior In case of compressed air p...

Page 81: ...ve 2 Non volatile memory failure Replace valve controller 3 Analog digital converter of sensor input failure Replace valve controller 4 Initialization of motion controller failed Wrong motion controll...

Page 82: ...ge detected Check if power supply is ok and is able to deliver needed power 9 6 SFV Position deviation axis1 to axis2 at homing procedure O Ring sticking 1 9 7 SFV Position deviation axis1 to axis2 at...

Page 83: ...ve and system await until the valve is cooled down complete before doing any work NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room glo...

Page 84: ...depending on process conditions A critical factor influencing the maintenance period is the lifetime of the vacuum grease being limited under increased temperature In this case grease will separate t...

Page 85: ...Maintenance Tool 813330 Protection cover 833841 Clean room wiper Isopropyl alcohol Description Required tool 1 Vent both valve chambers 2 Refer to chapter Local operation and follow the instruction fo...

Page 86: ...bonnet screws Allen wrench 5mm 8 Remove the bonnet Take care to valve body and sealing surface 9 Place the protection cover at valve body 10 Fasten the screw on the left by hand Protection cover 11 P...

Page 87: ...Place the gate on a clean surface 16 Remove gate seal with the O ring removal tool 17 Clean out valve body with alcohol Use an appropriate non metal tool with clean room wiper to enter valve body Do...

Page 88: ...seam of the o ring must be straight on the side not twisted Not OK twisted seam of the o ring OK o ring seam straight on the side Not OK twisted seam of the o ring OK no visible o ring seam after pres...

Page 89: ...e care to valve body and sealing surface 23 Move the gate into valve body by hand 24 Dismount the protection cover at valve body Protection cover 25 If necessary replace the bonnet seal 26 Install the...

Page 90: ...nect power cable to controller 31 Do power ON for the valve The valve move to home position 32 Enable the PFO in menu Valve Parameters Power Fail Option True and press Enter on keyboard 33 Perform a L...

Page 91: ...ts Maintenance Tool 813330 Protection cover 833841 Clean room wiper Isopropyl alcohol Clean room gloves Description Required tool 1 Vent both valve chambers 2 Refer to chapter Local operation and foll...

Page 92: ...bonnet screws Allen wrench 5mm 8 Remove the bonnet Take care to valve body and sealing surface 9 Place the protection cover at valve body 10 Fasten the screw on the left by hand Protection cover 11 P...

Page 93: ...d tool 13 Loosen the gate fixation screw Open end wrench 17 mm 14 Remove the gate from valve body 15 Place the gate on a clean surface 16 Place the Maintenance Tool at actuator shaft The Maintenance T...

Page 94: ...ent VAT do recommend two person for the next 2 steps 17 The 1st person dismounts the 4 actutor screws The 2nd person holds the Maintenance Tool at actuator shaft see step16 Allen wrench 5mm 18 The 2nd...

Page 95: ...e O Ring in with grease and assemble it to the inner groove S1 For rotary feed through O rings refer to chapter Spare parts Vacuum grease 23 Apply a lubrication depot with 0 2ml vacuum grease on the l...

Page 96: ...cuum grease 26 Distribute the grease with gloves around 360 27 Reassemble the actuator at valve body Allen wrench 5mm 28 Fasten the 4 actuator screws with 12 Nm Allen torque wrench 5mm 29 Clean the di...

Page 97: ...g areas Check cleanliness with high bright LED lamp Not OK grease is visible OK whole shaft is cleaned Isopropyl alcohol Clean room wiper 33 Install the gate on the shaft 34 Push the gate down by usin...

Page 98: ...tool until a position is reached on which the gate can be moved in Maintenance Tool Take care to valve body and sealing surface 37 Move the gate into valve body by hand 38 Dismount the protection cov...

Page 99: ...cable to controller 43 Do power ON for the valve The valve move to home position 44 Enable the PFO in menu Valve Parameters Power Fail Option True and press Enter on keyboard 45 Perform a Leak test f...

Page 100: ...rs under power The option board may or may not be equipped in your valve depending on the order Refer to page 1 of this manual to check valve version This board includes the optional modules for the v...

Page 101: ...e in between the upper and the lower curve Therefore please determine the equivalent maintenance period for replacing the Ultra Cap battery Option board This graph shows estimated life of Ultra Cap PF...

Page 102: ...epairs may only be carried out by the VAT service staff In exceptional cases the customer is allowed to carry out the repairs but only with the prior consent of VAT Please contact one of our service c...

Page 103: ...d work 9 1 Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve NOTICE Valve in open position V...

Page 104: ...e humidity between 10 and 70 temperature between 10 C and 50 C non condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use...

Page 105: ...opriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care When returning products to VAT please fill...

Page 106: ...s with a protective foil 2 Pack valve appropriately by using the original packaging material VAT disclaims any liability for damages resulting from inappropriate packaging 10 2 Transport NOTICE Inappr...

Page 107: ...age in the case of improper handling Observe local regulations in regard to waste disposal without fail Commission an authorized waste disposal company for the professional disposal of your waste NOTI...

Page 108: ...arts see chapter Identification of product This is to ensure that the appropriate spare parts are supplied VAT makes a difference between spare parts that may be replaced by the customer and those tha...

Page 109: ...e fixation screw 6 Flange seal chamber side 7 Gate complete 10 Gate seal N 5100 275 Viton Other on request 12 Flange seal pump side 13a Rotary feedthrough vacuum lip seal N 5100 226 Viton Other on req...

Page 110: ...376837 12 1 3 Accessories Description Part number 24 VDC power supply unit input 100 240 VAC 369877 Adapter cable for power supply unit 735567 Service cable USB A B male male PC to valve Service conn...

Page 111: ...Series 655 APPENDIX 979645EA Edition 23 09 2019 111 112 13 Appendix...

Page 112: ...Series 655 112 112 Edition 23 09 2019 979645EA This page left blank intentionally...

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