Varian 969-9507 Instruction Manual Download Page 3 | Manualshive

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Summary of Contents for 969-9507

Page 1: ...RUCCIONES MANUAL DE ISTRUÇÕES BEDRIJFSHANDLEIDING ISTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA Ο ΗΓΙΕΣ ΧΡΗΣΕΩΣ FELHASZNÁLÓI KÉZIKÖNYV PODRECZNIK INSTRUKCJI NÁVOD K POUŽITÍ NÁVOD NA OBSLUHU PRIROČNIK ZA NAVODILA INSTRUCTION MANUAL Turbo V 70 Controller Model 969 9507 vacuum technologies ...

Page 2: ...Turbo V 70 Controller ...

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Page 5: ...sk nadzorna stikala vodnega toka itn V naslednjih odstavkih so navedene vse informacije ki so potrebne za zagotavljanje sigurnosti uporabnika med rokovanjem s to napravo Podrobnejše informacije najdete v priponki Technical Information V tem priročniku so varnostne informacije razvrščene v dva razreda Znak svarila opozarja uporabnika da mora pri določenem postopku ali pri posebnem delovanju paziti ...

Page 6: ...edajte si paragraf Use v dodatku Technical Information Nekaj od naslednjih navodil velja za model 969 9507 samo če je pri tem priključen dodatek Hand held terminal Predno vklučite controller morate izvesti vse električne in pnevmatske priključke pri tem morate upoštevati priročnik črpalke Da bi se izognili poškodbam bodisi oseb kot naprave morate poskrbeti da bo črpalka stabilno vgrajena če monitr...

Page 7: ...e lahko rokuje s to napravo Leva plošča Desna plošča 1 Izhodni konektor logičnih signalov spajalni konektor s zapiralnim mostičkom 2 Izhodni konektor logičnih in nadzornih signalov toka črpalke 3 Izhodni močni konektor 24 Vcc za hladilni ventilator črpalke 4 Konektor za priključitev kabla črpalke 5 Vhodni modul napajanja controllera Vsebuje zaščitno varovalko menjalca napetosti močno napajlno vtič...

Page 8: ...da ni prišlo do izgub v sistemu Pritisnite dvakrat tipko START za ponoven zagon črpalke FAULT PUMP OVERTEMP Temperatura gornjega ležišča ali črpalke je presegla i 60 C Počakajte da se temperatura vrne pod normalnim vrednostnim pragom Pritisnite dvakrat tipko START za ponoven zagon črpalke FAULT CONTROLLER OVERTEMPERATURE Temperatura transformatorja controllera je presegla 90 C Počakajte da se temp...

Page 9: ...ain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The ...

Page 10: ...Some procedures can be executed with controller 969 9507 only when the accessory Hand held terminal is available Make all vacuum manifold and electrical connections and refer to Turbo V pump instruction manual prior to operating the Turbo V controller To avoid injury to personnel and damage to the equipment if the pump is laying on a table make sure it is steady Never operate the Turbo V pump if t...

Page 11: ...maintenance Any work performed on the controller must be carried out by authorized personnel Left Panel Right Panel 1 Logic input signals connectors mating connector supplied with link 2 Logic output signals connector and pump current monitor 3 Power output connector 24 Vdc for pump cooling fan 4 Connector to the pump cable 5 Controller power entry module consisting of mains fuses voltage change o...

Page 12: ...m 0 to 9 indicating the step number not passed Verify that system has no leaks Press the START pushbutton twice to start the pump FAULT PUMP OVERTEMP The upper bearing pump temperature exceeds 60 C Wait until the temperature decrease below threshold value Press the START push button twice to start the pump FAULT CONTROLLER OVERTEMPERATURE The controller transformer temperature exceeds 90 C Wait un...

Page 13: ...C mains supply into a 3 phase low voltage medium frequency output which is required to power the Turbo V pump The microcomputer generates the variable output frequency and controls the 3 phase output voltage according to the software and the gas load condition of the pump Moreover it manages signals from sensors input output connection information to be displayed on the hand held terminal and give...

Page 14: ...10 3 phase 1250 Hz 2 150 W maximum Operating temperature 0 C to 40 C Storage temperature 20 C to 70 C Fuse mains 2 x T3 15 A slow blow disregarding the mains Radio interference suppression EN 55011 class A group 1 EN 61010 1 IEC1000 4 2 1000 4 3 1000 4 4 Weight 3 8 Kg 8 4 lbs CONTROLLER OUTLINE The outline dimensions for the Turbo V 70 controllers are shown in the following figure Controller outli...

Page 15: ...ck back door for voltage selector set Using a small screw driver pull out the voltage selector and fuses Select the operating voltage then firmly insert the voltage selector and fuses in place Check voltage selector window for correct set and connect the power cord POWER INTERCONNECTIONS Connection J7 120 Vac Connector The 120 Vac 1 A maximum independent of line voltage output voltage is present a...

Page 16: ...the contact opens the turbopump is stopped With the remote mode operation selected the front panel push button is inoperative 2 7 Remote LOW SPEED optically isolated from the internal circuit requires a permanently closed contact relay contact transistor etc When the contact closes the turbopump runs at low speed and when the contact opens the turbopump reverts to high speed mode With the remote m...

Page 17: ...RT signal 24 V 60 mA optically isolated output pin 13 positive pin 6 negative The output voltage will be present when the START push button on front panel is pressed or the remote start is present or the function has been requested by RS 232 until NORMAL operation is reached PIN DESCRIPTION 7 14 R2 signal 24 V 60 mA optically isolated output pin 14 positive pin 7 negative The output Voltage will b...

Page 18: ...CB AMP Cannon or equivalent 15 pin D type male connector The external cable not supplied between the host computer and the controller doesn t require any crossed wires so that the signal are connected correctly Minimum connection configuration For example the Transmit data signal from controller pin 2 must be connected to the host computer s Receive data line pin 3 and vice versa Consult the host ...

Page 19: ...r the requested information Allowed ASCII characters A START B STOP C Low Speed ON D Low Speed OFF E Request for operational parameters F Pump times zeroing G Parameters reading H Parameters writing I Request for operating status J Request for numerical reading K Request for counters reading CRC corresponds to the sum with inverted sign of all the preceding bytes e g the START command A in ASCII c...

Page 20: ...ed send a Request string a string with 9 characters of the following type H data CRC The following parameters can be changed BYTES MEANING 1 Speed threshold 2 5 Run up time in seconds long coded in 4 bytes 6 Deat time 0 NO 1 YES 7 Controller OFF when R2 OFF 0 NO 1 YES 8 Soft Start mode 0 YES 1 NO 9 CRC When the Request is I Status readings the Answer will contain a string of 2 characters with the ...

Page 21: ...e left in position including the shipping links if no external connections are made The forepump and the Turbo V pump can be switched on at the same time If the Turbo V pump is operated via remote signal is shown in the following paragraph If the hand held terminal is used to monitor the pump operating conditions follow para 3 2 if reprogramming or trouble shooting is required follow para 3 3 and ...

Page 22: ... S T A R T P U M P R E A D Y P U S H S T A R T B U T T O N Press the CYCLE NUMBER twice and the display shows X X X X C Y C L E X X X X X m P U M P L I F E X X X X X h where CYCLE are the cycles performed range 0 to 9999 m is the elapsed time related to the cycle number displayed range 0 to 99999 minutes PUMP LIFE is the total operation time of the pump range 0 to 99999 hours FRONT REMOTE 232 Sele...

Page 23: ...NT panel operation After choosing the desired selection by pressing the CYCLE push button press the PUMP CURRENT push button to enter the value The display shows R S 2 3 2 B A U D R A T E X X X X where XXXX means 600 1200 2400 4800 9600 baud rate for the host computer or printer communication The controller is factory set for 9600 baud rate operation If necessary select the desired value by pressi...

Page 24: ...g figure Monitor Relay Programming The display shows S P E E D T H R E S H O L D S E L E C T I O N X X K R P M where XXKRPM is the switch point of relay R1 at the preset turbopump speed adjustable from 00 to 99 KRPM The speed threshold will condition the R1 and R2 operation see the following cycle diagram and it is factory set to 67 KRPM The speed threshold will condition the R1 and R2 operation a...

Page 25: ...pressing the CYCLE NUMBER push button select YES if relay R2 must operate only after the run up time or select NO when the R2 operation is needed right from start of the turbopump and after the rotational speed of the turbopump exceeds for the first time the speed threshold value This function is factory set to YES After selection press PUMP CURRENT to confirm the display will be as shown in the f...

Page 26: ...E NUMBER and PUMP CURRENT push buttons are always active even when the operating mode selected is REMOTE or RS 232 Press the START push button or use the remote or RS 232 start signal and the display shows S O F T S T A R T O N Where the sign minus become a square when the pump finish the ramp up step The active step is indicated by a flashing square As the ten steps are fully covered the pump wil...

Page 27: ...eak or the pressure in the pump chamber is high from 1 mbar to atmosphere the pump continues to operate indefinitely If the gas load at the turbopump inlet flange continues to stay high the power drawn by the turbopump increases up to the maximum value Than the Turbo V pump is slowed down in proportion to the gas load at least until it reaches about 9 KRPM This will occur either in NORMAL operatio...

Page 28: ...n is reached the display shows A P P R O A C H I N G L S X X K R P M L S while approaching the low speed value When the low speed mode is deselected the pump starts to accelerate to its rotational speed The display shows N O R M A L O P E R A T I O N X X K R P M Pump Shutdown Press the front panel STOP pushbutton or remove the remote signal the power from the turbopump will be removed and the pump...

Page 29: ...START STOP and LOW SPEED front panel pushbuttons are inoperative while the CYCLE NUMBER and PUMP CURRENT pushbuttons are always active RS 232 Control Mode Operation If the RS 232 option is installed and the controller has been programmed for RS 232 operation the controller may be driven by a computer and when ready to operate the display shows R E A D Y F O R R S 2 3 2 S O F T S T A R T If the Sof...

Page 30: ...ach the planned value within 15 minutes the display will be as shown in the following figure F A U L T O V E R T I M E S X Verify that systems has no leaks than press STOP RESET pushbutton twice to start the pump NOTE If the upper bearing pump temperature exceeds 60 C the pump is shut off and the display will be as shown in the following figure F A U L T P U M P O V E R T E M P The message will st...

Page 31: ...ach or 3 x 78Ω 50 W each Potentiometer 50 KΩ 1 4 W minimum b Test set up Remove the power cable Disconnect the Turbo V controller Remove the cover from the Turbo V controller Set potentiometer to 30 KΩ and connect it as directed in the following figure Check the line voltage selector and connect the power cable to the appropriate socket Dummy load connections Power Supply Test a DC voltage test Ch...

Page 32: ...start up it should be 42 Vac with 78Ω dummy load and 42 Vac with 48Ω dummy load On the controller front panel press the STOP pushbutton and remove the power cable Pump over Temperature Test Disconnect the potentiometer set it to 5KΩ and then reconnect it Disconnect the dummy loads Connect the power cable On the controller front panel push the START pushbutton The display should be as shown in the ...

Page 33: ... input mating connector 969 9853 P7 mating plug 969 9854 Mains cable European plug 3 m long 969 9957 Mains cable American plug 120 V 3 m long 969 9958 OPTIONS DESCRIPTION PART NUMBER RS 232 kit 969 9851 P2 output mating connector 969 9852 Controller to pump extension cable 5 m extension 969 9950 ...

Page 34: ...1 2 3 4 1000 2000 2000 CHECKED DATE CHAMFER SCALE Ra um PARALLELISM PERPENDICULARITY CONCENTRICITY ANGLE CLASS 03 660822 TV70 OEM MAINS WIRING DIAGRAM H C C19 94 C M 08 06 94 A3 06 94 C M C 5 9 4 8 3 7 2 6 1 ANALOG ANALOG D N D N 03 660824 03 660824 J10 4 J10 3 POWER SUPPLY D N 03 660823 0 0 18 18 0 19 240 220 120 100 0 69 TRANSFORMER 140VA 03 660964 1 2 3 4 5 2 FUSE T3A 3 PHASE OUTPUT J10 J8 AND ...

Page 35: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Page 36: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Page 37: ... Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S de R L de C V Concepcion Beis...

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