TECHNICAL INFORMATION
70
87-900-968-01(C)
where:
•
Tb = upper bearing temperature
•
Tbody = measured water cooling related tem-
perature
•
Tbody,lim = body temperature corresponding
to Twater,max, according to Figure 2
•
WIN.118 = set the body temperature control
Figure 1
Figure 2
A thermistor sensor is mounted near the upper
bearing in order to read the bearing temperature
and to prevent the pump from overheating.
A thermistor sensor is mounted near the water-
cooling channel in order to evaluate the cooling
efficiency.
The pump can be water cooled only. For this pur-
pose the customer must use the dedicated chan-
nel on the pump body.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01
µ
m.
The pump can operate in any position and must be
supported on the high vacuum flange. The con-
nection of the forevacuum on the side of the pump
is a KF 40 NW flange.
Controller Description
The dedicated controller is a solid-state frequency
converter which is driven by a single chip micro-
computer.
The controller can be operated by a remote host
computer via the serial connection (a Windows-
based software is available as an option), or by the
remote I/O connector.
At every power-up the controller is in “Remote
Mode” of operation and accepts only commands
from J1 remote I/O connector. To put it in “Serial
Mode” of operation please refer to the serial com-
mand table.
TECHNICAL SPECIFICATION
Pumping speed
(without inlet screen)
N
2
:
Ar:
1600 l/s
1400 l/s
Compression ratio
N
2
Ar
3 x 10
5
6 x 10
5
Base pressure with
recommended
forepump
5 x 10
-8
mbar
(4 x 10
-8
Torr)
(
According to standard DIN 28
428, the base pressure is that
measured in a leak-free test
dome, 48 hours after the comple-
tion of test dome bake-out, with a
Turbopump fitted with a ISO 250
flange and using the recom-
mended pre-vacuum pump)
Inlet flange
ISO 250 F
Foreline flange
KF 40 NW
Nominal rotational
speed
33000 rpm
Start-up time
<
7 minutes
Recommended
forepump
> 40 m
3
/h
Operating position
Any
Operating ambient
temperature
+5 °C to +40 °C
