Models 947, 948 and 960 Leak Detectors Operations and Service Manual
B-12
6. Loosen the wing nut and remove the NW25 clamp that connects the foreline to the
turbo (Figure B-7 on page B-10).
7. Remove the centering ring and O-ring and place them on a clean surface.
CAUTION
At this point the pump is held solely by the four ISO single claw
clamps connected to the Service Valve Block assembly SVBA.
When removing the clamps, be sure to support the pump so it
does not drop.
8. Be sure that the turbo pump is supported, then unbolt and remove the four ISO single
claw clamps located on the corners of the Service Valve Block assembly (SVBA)
To obtain more space to maneuver the turbo pump:
❑
Loosen and remove the NW25 clamp to the upper foreline connection (Figure B-7
on page B-10).
❑
Remove the foreline, centering ring and O-ring and place them on a clean surface.
9. Remove the turbo pump.
10. Remove the ISO50 centering ring and O-ring and place them on a clean surface.
B.3.1.2 Replacing the Turbo Pump
Before you replace the turbo pump, examine and clean all O-rings centering rings, clamps
and the SVBA.
B.3.1.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold
To perform this procedure:
1. Using VacuSolv
presaturated cleaning wipes and swabs, thoroughly wipe down all
surfaces of the centering rings, clamps, and manifold.
CAUTION
Do not clean any aluminum parts with Alconox
. Alconox is
not compatible with aluminum and will cause damage.
2. Carefully inspect all O-rings and replace all damaged O-rings.
NOTE
Varian Vacuum Technologies recommends replacing all
O-rings during routine maintenance or during any maintenance
procedure requiring that O-rings be removed.
