Varian 960, Operation And Service Manual

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Models 947, 948 and 960 Leak Detectors Operations and Service Manual
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4-9 947/948/960 Spectrometer Tube Installation .................................................................... 4-23
4-10 TC1 Gauge in the MVBA .................................................................................................. 4-24
4-11 TC2 Gauge in the SBA ..................................................................................................... 4-26
4-12 Rough Pump and Forepump Oil Level Check .................................................................. 4-32
4-13 The Test Port .................................................................................................................... 4-33
4-14 Remove the Test Port Compression Ring and O-ring ...................................................... 4-34
4-15 Placing the O-ring and Compression Ring onto the Test Port .......................................... 4-35
A-1 Service Pendant Keypad ....................................................................................................A-1
B-1 Removing the Service Pendant Shelf .................................................................................B-2
B-2 The Top Panel at the Rear of the Turret .............................................................................B-3
B-3 The Test Port ......................................................................................................................B-3
B-4 The Top Panel from the Front of the 947/948/960..............................................................B-4
B-5 Ion Source Replacement ....................................................................................................B-6
B-6 Location of the Turbo Pump ...............................................................................................B-9
B-7 Turbo Power and Foreline to Turbo Connections .............................................................B-10
B-8 The Turbo Power Connection ...........................................................................................B-11
B-9 Radiator Clamp holding Fan to Turbo...............................................................................B-11
B-10 Location of Forepump and Rough Pump — Wet and Dry Configurations ........................B-15
B-11 Rough Pump Manifold and Exhaust Connections ............................................................B-16
B-12 Rough Pump Manifold and Exhaust Connections ............................................................B-18
G-1 Test Piece Evacuated: Tracer Probe Used to Locate Leak ............................................... G-6
G-2 Test Piece Evacuated and Hooded with Helium Atmosphere to
Determine Overall Leak Rate ............................................................................................ G-6
G-3 Test Piece Pressurized: Detector Probe Used to Locate Leak.......................................... G-6
G-4 Test Piece Sealed with Helium and/or Other Gases –
Bell Jar Used to DetermIne Overall Leak Rate .................................................................. G-7
G-5 Magnetic Separation Principle ........................................................................................... G-8