Ulvac VS1501, Instruction Manual

Page: 62 / 77

SK00-4390-DI-002-11
42
(4) Cleaning for cylinder exhaust valve
Work
① ：
Remove the bolts (M10x7pcs) mounting the upper cover. It becomes easy upon mounting
the removed 2 pieces of bolts on the tap
hole.
Work
② ：
Upon removing the upper cover, two
openings can be seen in the cylinder.
Put the lid of prevention for foreign object
drop to the opposite side opening part of
the exhaust valve unit.
Work
③ ：
Remove the bolts (M6 x 6 pcs)
mounting the exhaust valve unit, and
dismount the exhaust valve unit and the
exhaust valve gasket. Caution should be
taken not to drop foreign objects into the
hole of the cylinder.
Work
④ ：
Remove the bolts (M4 x 4 pcs)
located at the exhaust valve guide of the
exhaust valve unit, and disassemble it to
the exhaust valve seat/the valve
plate/the valve guide.
Work
⑤ ：
Wipe off foreign objects/sludge
attached to each parts with solvents and
soft waste. Do not damage the surface
without using a hard brush/scrubber. Do
not bend and fold by applying the force to
the exhaust valve plate.
Work
⑥ ：
Clean also the inside of the exhaust
valve unit mounting part of the cylinder
opening, and remove foreign
objects/sludge.
Work
⑦ ：
In a retrograde order,
assemble/mount the exhaust valve unit.
Tighten all bolts with the specified
torque. (Confirm with "Relations with the
bolt size and the specified torque value”
to be used in P.32)
※
The simple overhaul is recommended to be
executed once every 6 months. However, since the extent of stains may different depending on the
customer’s use conditions, set the interval (Periods) of the valid simple overhaul every processes.