Ulvac VS1501, Instruction Manual

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SK00-4390-DI-002-11
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10. Main Displacement Parts
Table. 8 Main displacement parts list (VS1501/VS2401 Common)
*1: O-ring of JIS standard
*2: Manufactured by TSUKIBOSHI KASEI Co., Ltd.
Name Standard / Dimensions Materials Q’ty
Oil seal TCV507212 Fluorine rubber 1
Bearing NU208EW SUJ 1
Oil seal TCV507212 Fluorine rubber 1
Bearing NU208EW SUJ 1
Oil seal TCV456812 Fluorine rubber 1
O-ring G75*1 Fluorine rubber 1
O-ring P10A*1 Fluorine rubber 6
O-ring AS568-262 (ISO-262) Fluorine rubber 2
O-ring AS568-282 (ISO-282) Fluorine rubber 1
Inlet O-ring V100*1 Fluorine rubber 1
Outlet O-ring V70*1 Fluorine rubber 1
O-ring G30*1 Fluorine rubber 1
O-ring G35*1 Fluorine rubber 2
O-ring G110*1 Fluorine rubber 1
Oil level gauge
gasket Non-asbestos
sheet
1
O-ring P10A*1 Fluorine rubber 1
Oil distributor
gasket
Fluorine rubber 1
O-ring P14*1 Fluorine rubber 1
O-ring P18*1 Fluorine rubber 3
O-ring P28*1 Fluorine rubber 1
O-ring P36*1 Fluorine rubber 1
Coupling spider
ABSO-FLEX MARK0Ⅱ
For M-132*2
Special rubber 1
O-ring AS568-254 (ISO-254) Fluorine rubber 2
Exhaust valve
vane
Exhaust valve vane A SUS 2
Exhaust valve
gasket
For VS1501
Non-asbestos
sheet
1
Jacket cover
gasket
For VS1501
Non-asbestos
sheet
1
O-ring AS568-264 (ISO-264) Fluorine rubber 2
Exhaust valve
vane
Exhaust valve vane A SUS 1
Exhaust valve
vane
Exhaust valve vane B SUS 2
Exhaust valve
gasket
For VS2401
Non-asbestos
sheet
1
Jacket cover
gasket
For VS2401
Non-asbestos
sheet
1
VS1501
VS2401
common
VS1501
VS2401
Cylinder
Top cover
Exhaust valve
Cylinder
Plugs
Coupling
Top cover
Exhaust valve
Rotor shaft
Oil level gauge
Oil distributor
valve
Section
Front cover
Rear cover
Oil seal case
Cylinder