SK00-4390-DI-002-11
46
Trouble
Causes
Processing method
Reference
Pressure does not
come down.
(1) Pump exhaust capacity
is smaller compared to
the Vacuum chamber
capacity.
(2) Pressure measurement
method is wrong.
(3) Vacuum gauge is not
appropriate.
(4) Pipe connected to the
Suction inlet is thin or
connection distance is
long.
(5) Metal mesh at the
Suction inlet is clogged.
(6) Oil is not supplied to the
specified volume.
(7) The oil is deteriorated.
(8) There is a leak in the
pipe connecting with the
Pump.
(9) Not using the ULVAC
genuine oil.
(1) Select another Pump type.
(2) Measure correctly the
pressure.
(3) Use the Vacuum gauge that
matches the measurement
pressure range and correctly
calibrated one to measure
the pressure.
(4) Connect a pipe wider than
inlet diameter and shorten
the connection distance
between the Vacuum
chamber.
(5) Remove the pipe above the
inlet and wash the mesh.
(6) Supply the oil to the
specified volume.
(7) Replace the oil.
(8) Use a Leak detector or the
like to find out the leak
position and stop it.
(9) Conduct the overhaul of the
Pump and replace the oil
with the ULVAC oil.
5.1
6.2.5
3.2
6.2.1
3.2
6.2.3
3.4
3.2
6.2.3
Summary of Contents for VS1501
Page 2: ......
Page 13: ...SK00 4390 DI 002 11 xi Fig 1 Warning Label display position...
Page 27: ...SK00 4390 DI 002 11 7 Fig 2 VS1501 Dimensional drawing...
Page 28: ...SK00 4390 DI 002 11 8 Fig 3 VS2401 Dimensional drawing...
Page 36: ...SK00 4390 DI 002 11 16 Fig 5 Suction Exhaust piping connection diagram...
