Ulvac GLD-137CC, Instruction Manual

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Contents - 3
Figures and Tables
Fig. 1 Dimensional drawing of GLD-137CC oil sealed rotary vacuum pump ······· 4
Fig. 2 Dimensional drawing of GLD-202BB oil sealed rotary vacuum pump ······· 5
Fig. 3 Transportation method of the oil sealed rotary vacuum pump ··········· 6
Fig. 4 Lubrication of the oil sealed rotary vacuum pump ······················ 7
Fig. 5 Basic piping diagram to the vacuum chamber ·························· 8
Fig. 6 Changeover switch in the terminal box
··························· 9
Fig. 7 Electric wiring diagram ·························· 11
Fig. 8 An Inlet(EN60320) ·························· 11
Fig. 9 Change region of the voltage and frequency ·························· 12
Fig. 10 Pumping speed curve
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Fig. 11 Replacement of the coupling spider ·························· 24
Fig. 12 Disassembly drawing of GLD-137CC oil sealed rotary vacuum pump ······· 30
Fig. 13 Disassembly drawing of GLD-202BB oil sealed rotary vacuum pump ······· 31
Table 1 Specification
·························· 3
Table 2 Characteristics of the thermal protector ·························· 16
Table 3 Periodic inspection table ·························· 21
Table 4 Trouble check list ·························· 25
Table 5 GLD-137CC Maintenance parts list ·························· 28
Table 6 GLD-202BB Maintenance parts list ·························· 29
Attached table: Safety Data Sheet for Vacuum Pump Oil SMR-100