Ulvac GLD-137CC, Instruction Manual

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Keep in mind that if the pump was used in accordance with its exhausting toxic
gas, both the pump unit and pump oil might become contaminated.
① Wear protective equipment such as rubber gloves and safety goggles.
② Be sure to read the attached “Safety Data Sheet” before adding oil. If
the oil accidentally comes into contact with your hands or enters your
eyes, take proper measures in accordance with the section “First-aid
treatment” shown in “Safety Data Sheet.”
Use only oils specified by us. If other oils are used, the pump performance
will deteriorate or its life will shorten.
< Pump oil replacement procedure >
(1) Release the pump inlet port to the atmosphere and operate the pump for five seconds. The oil
remaining in the pump is discharged efficiently.
(2) Remove the exhaust port and drain plug to discharge the pump oil.
(3) Mount the drain plug, and add the required amount of the new specified pump oil through
the oil inlet port (see Fig. 4).
(4) If the pump oil is contaminated extremely, add new pump oil and perform operation for a
while (several minutes) to clean the pump. Repeat this a few times.
(5) After replacing with the new pump oil, operate the pump and when the pump has become
warm, check the ultimate pressure.
(6) If the pump oil is so dirty that oil sludge accumulates at the bottom of the pump, the
specified ultimate pressure even after the pump oil is replaced. In such a case, overhaul the
pump.
Danger
Caution
Note