Ulvac GLD-137CC, Instruction Manual

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1.1.4 Caution High temperature
Cause Prevention method and measures
High temperatures caused
burns.
⇒ ①
The pump reaches a high temperature during operation.
(Temperature increasing)
Pump main unit during non-load operation
→
25K
Motor during non-load operation
→
25K
Pump main unit during high-load operation
→
75K
Motor during high-load operation
→
25K
(High-load operation: Operation at a pressure of 1kPa ~ 10kPa)
②
If you use the pump in a high ambient temperature and
have a high gas throughput, the temperature of the
pump-boby may exceed 90
℃
and you must fit suitable
guards to prevent contact with hot surfaces.
③
Please be sure to protect and cool surface of
vacuum pump and away from human body. Use this pump
as built-in type.
④
Since the surface temperature is hot, touching the
surface accidentally may result in burns. Never touch the
pump during operation. When carrying out inspection, wait
for 10 minutes until the pump has cooled down completely
after it stops.
1.2 Safety Data Sheet (SDS)
The attached
“Safety Data Sheet (SDS)
” shows chemical materials which may be used or
touched when operating the pump. Read the SDS carefully in order to understand the harmful
properties of these materials.
Contact us before using chemical materials (vacuum pump oil) other than those mentioned in
this instruction manual.
SDS is submitted as reference information to ensure safe handling of hazardous
and harmful materials. Personnel handling the pump oil should be aware that
proper measures must be taken depending on the conditions of use as their
responsibility. Keep in mind that the SDS itself is not a warranty for safety.
Newest SDS shall be used when the safety of material is investigated.
Caution