－30－
Problem Cause
Measures
Reference
Abnormal sound is
generated.
⑥
Oil does not circulate, or the oil
hole of the cover is clogged.
⑥
Overhaul and clean the oil hole.
６．２
⑦
Components inside the pump
have burnt out.
⑦
Overhaul (replace the damaged
components).
６．２
Pump surfaces are
extremely hot
．
①
Continuous operation at high
evacuation pressure.
①
When it runs by high inhalation
pressure consecutively, there is
no problem in particular in
pump surface temperature to
less than 40K.
４．１
②
The specified amount of oil has
not been added. (If the oil
amount is not sufficient, the
cooling effect
of the pump will be reduced.)
②
Add the specified amount of
oil.
６．３
③
The temperature of the evacuated
gas is high.
③
Mount cooling equipment such
as a gas cooler at the inlet side.
--
④
Oil does not circulate, or the oil
hole of the cover is clogged.
④
Overhaul and clean the oil hole.
６．２
A lot of oil splashes
out from the outlet
port.
①
The pump is been filled in excess
of the specified amount.
①
Discharge the oil until it reduces
to the specified amount.
６．３
②
Continuous operation is
performed at a high evacuation
pressure.
②
Install an oil mist trap at the
outlet side.
４．７
４．８
The oil leaks
outside the pump.
①
Deterioration of the O-ring and
the oil seal of the case and cover.
①
Check and replace the O-ring
and oil seal.
６．２
