－3－
1.1.4
Cause
Prevention method and measures
High temperatures caused burns. ①The pump reaches a high temperature during
operation.
（Temperature increasing）
Pump main unit during non-load operation
→30K
Motor during non-load operation
→35K
Pump main unit during high-load operation
→35K
Motor during high-load operation
→40K
(High-load operation: Operation at a pressure
of 1kPa ～ 10kPa)
②Please be sure to protect and cool surface
of vacuum pump and away from human body. Use
this pump as built-in type.
③Since the surface temperature is hot,
touching the surface accidentally may result
in burns. Never touch the pump during
operation.
When carrying out inspection, wait for 10
minutes until the pump has cooled down
completely after it stops.
Never place combustible materials around the motor or pump. There is a risk of fire.
Also, do not place objects which block ventilation around the motor. Abnormal heat
generation may result in burns or fire.
Caution
High temperature
Caution