
Contents-03
Figures and Tables
Figure1. Dimensional drawing of GHD-031 oil sealed rotary vacuum pump・・・・・・・・・ 6
Figure2. Basic piping diagram to the vacuum chamber
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Figure3. Electric wiring diagram
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Figure4. Inlet (EN60320-1)
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Figure5. Change region of the voltage and frequency
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Figure6. Pumping speed curve
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Figure7. Characteristics of motor power
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Figure8. Lubrication of the oil sealed rotary vacuum pump
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Figure9. Disassembly drawing of GHD-031 oil sealed rotary vacuum pump
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Table1. Specification
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5
Table2. Power cable selection standards
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Table3. Characteristics of the thermal protector
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Table4. Periodic inspection table
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Table5. Trouble check list
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Table6. GHD-031 Maintenance parts list
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Attached table: Safety Data Sheet (SDS) for Vacuum Pump Oil R-2