－29－
Problem Cause
Measures
Reference
①
The pump is too small for the
volume of the vacuum chamber.
①
Select another pump.
５．２
②
The pressure measurement
method is not correct.
②
Measure the pressure correctly.
５．１
③
The vacuum gauge is not
suitable.
③
Measure with a calibrated
vacuum gauge suitable for the
pressure range.
５．１
④
The pipe connected to the inlet
port is small, or the piping
distance is long.
④
Use pipes having a diameter
larger than the inlet port
diameter, or reduce the distance
from the vacuum.
５．１
⑤
The wire mesh at the inlet port is
clogged.
⑤
Remove the piping from the
upper section of the inlet port,
and clean the wire mesh.
６．２
⑥
The specified amount of oil has
not been added.
⑥
Add the specified amount of
oil.
６．３
⑦
The oil has deteriorated.
⑦
Replace the oil.
６．３
⑧
Leakage occurs from the pipe
connected to the pump.
⑧
Locate the leakage with a
leakage detector and stop the
leakage.
--
⑨
Our specified oil is not being
used.
⑨
Overhaul the pump and replace
with oil specified by us.
６．３
The pressure does
not decrease.
⑩
Oil does not circulate, or the
oil hole of the cover is clogged.
⑩
Overhaul and clean the oil hole.
６．２
①
Problem with power supply
voltage.
①
Set the power supply voltage to
within ±10% of the rated
voltage.
３．５
②
The motor malfunctions.
②
Replace the motor.
６．２
③
Foreign matter has entered the
pump.
③
Eliminate the foreign matter
and overhaul the pump.
６．２
④
The specified amount of oil has
not been added.
④
Add the specified amount of
oil.
６．３
Abnormal sound is
generated.
⑤
The coupling malfunctions.
⑤
Overhaul (replace the
coupling).
６．２