Ulvac G-101D, Instruction Manual

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8. Maintenance parts
8.1 Maintenance parts list
Table 6 G-101D Maintenance parts list
Product name No.
Parts name
O
’
ty
17 Outlet valve 4
18 Outlet valve spring 4
38 O-ring _S-6 1
39
O-ring
_S-24 1
40
O-ring
_S-55 1
41
O-ring
_P-8 1
42 O-ring _P-12 1
43
O-ring
_P-24 1
44
O-ring
_V-160 1
45 Oil seal_HTC-17-40-9 1
46 Oil seal_SCY-17-30-7 1
47 Oil seal_SC-15-30-7 1
G-101D
Maintenance kit A
70
O-ring
_P-20 1
6 1st vane 2
7 Vane spring 8
12 2nd vane 2
14 Middle pin 4
28 Oil level gauge 1
31
Coupling φ 14× φ 16
1
36 Bearing _6203 1
37 Bearing _6002 1
- Tube 1
G-101D
Maintenance kit B
- Sleeve _SN1/8 2
Note : For the relationship between components, see the disassembly drawing.