- 03 -
0.3 Cautions for safety
When toxic or flammable gases are exhausted from the pump, they may leak not
only from the pump outlet but also from the pump unit itself. Take proper
measures suitable for the type of gas.
After the pump has been used for exhausting toxic gasses, not only the pump
itself but also vacuum pump oil (hereinafter called “pump oil”) get toxic.
Keep this in mind when performing the maintenance.
Never allow people other than repair engineers to disassemble or repair the
pump. Failure to do so may result in ignition or malfunction, leading to injury
or electric shock.
Before performing inspection or repair, always turn off the power switch.
Failure to do so may result in electric shock or the unexpected start of the
pump, leading to injury.
Connect the earth wire correctly. It is recommended that a dedicated earth
leakage breaker should be installed. If the earth wire is not connected, there
is a possibility of electric shock occurring in the case of a malfunction
or electrical leakage.
There is a risk of explosion. Never block the outlet or operate the pump with
equipment mounted at the outlet side which blocks the passage of gas.
Otherwise, the internal pump pressure increases causing the pump to explode,
the oil level gauge to protrude or the motor to be overloaded.
This pump is not resistant to pressure. The internal pump pressure is limited
to 0.03 MPa (gauge pressure).
Warning
Danger
Danger
Warning
Warning
Warning