
5
3.7 Piping
1)
Ensure that all piping is installed without leaks, and fit a filter on the pump inlet.
2)
Use inlet piping with an internal diameter of 5 mm or more.
3) Ensure that piping connected to the outlet does not cause back pressure. Maximum back
pressure is 0.03 MPa (gauge pressure).
4)
In case of selecting the inlet pipe and exhaust pipe that are not from our products, please
select the exhaust pipe that has same or larger inner diameter length with the inlet pipe.
5) When evacuating a vessel, ensure that a shut-off valve is placed between the pump inlet pipe
and the vessel (see Fig.3.3).
Fig.3.3 Example of Piping Used When Evacuating a Vessel
3.8 Storage
Switch off the main power supply and check that the pump has stopped.
Remove the power cord connected to the pump, place the rubber caps over the inlet and outlet,
and store in a location with low humidity
4. Cautions for Operation
4.1 Cautions for Operation
See Danger (1)(2), P04
See Warning (8)(14)(15)(16), P04,P05
See Caution (4)(6)(7), P05
See Note (3)(4)(5)(6)(7)(8)(9)(10)(11), P06
4.2 Operation of the Thermal Protection Relay
1) If the thermal protection relay operates, switch off the main power supply immediately and
contact the manufacturer. The motor will be extremely hot and should not be touched under
any circumstances.
2) When the cause of the problem has been eliminated, check that the motor has cooled, switch
on the main power supply, and check that the pump is operating.
See Caution (5), P05
See Note (12),P06
Vacuum pump
Filter
Leak valve
Shut-off valve Vessel
!
Warning
!
Caution
!
Note
!
Caution
!
Danger
!
Note