Ulvac DISL-503, Instruction Manual

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3. Installation
WARNING
Danger of electric shock
Install in an area which is not exposed to moisture such as rain or steam.
If moisture comes into and tact with the electric source connection, it can cause fire or
bodily injury due to short-circuit or electric shock.
Avoid moisture
Danger of explosion, fire and accident
Install in an area free from explosive, flammable or corrosive substances.
If not, it can cause explosion, fire or accident.
Install at a safe site
CAUTION
Danger of overheating
Operate at ambient temperature of 5
℃
~40
℃
.
Operating at a temperature range other than that designated can cause accident, failure
or bodily injury such as burns due to overheating.
Use at designated
temperature
Danger of overheating
Install in a well-ventilated area (refer to below chart).
Poor ventilation can disrupt cooling and cause accident, failure or bodily injury such as
burns since this vacuum pump is an air-cooled type.
Do not block inlet and outlet of cooling air with obstruction.
(Separate inlet side of the cooling air from obstruction or wall by 10cm or more, and
separate outlet side by 30cm or more)
Necessary ventilated air volume
Over 8m
3
/min
Pa y atte ntion to
ven tilati on
Danger of dust
Be sure site is free from dust.
Sucking in of dust can cause failure.
Avoid du st
Danger of movement
Be sure to fix vacuum pump on solid and level floor (less than 5° inclination).
Uneven fix can cause failure and movement of vacuum pump. Fix pump base with 2 bolts
using hole of φ8.5mm at leg section.
Install o n a
solid, le ve l floo r
Danger of overheating
Install where equipment is not exposed to direct sunlight.
Vacuum pump exposed to direct sunlight can overheat, resulting in failure.
Avoid d irect
sunlight