Ulvac DISL-503, Instruction Manual

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5. Maintenance and inspection
WARNING
Danger of failure and bodily injury
Conduct periodical maintenance and inspection.
If not, it can cause insufficient performance, failure of vacuum pump, and bodily injury.
Conduct periodical
maintenance and
inspection
Danger of burns
Conduct maintenance and inspection only after vacuum pump becomes cool
enough.
Maintenance and inspection soon after vacuum pump stops can cause burn injury.
Be careful about
high temperature
Danger of electric shock
Be sure to conduct maintenance and inspection after you turn off electric source.
If not, it can cause bodily injury from electric shock or turning object.
Turn off electric
source
Danger of accident, failure and shorter operating lifetime
Ask specialist to perform repairs.
Defective repairs can cause accident, failure or shorter operating lifetime.
Ask specialist to
perform repairs
5.1 Daily maintenance and inspection
Conduct the following daily maintenance and inspection.
Items Contents Measures
Vacuum pump itself
Abnormal sound Ask specialist to repair.
Abnormal vibration Ask specialist to repair.
Abnormal temperature Ask specialist to repair.
Cooling fins are dirty or clogged Blowing air, cleaning
Cooling fan
Fan cover
Abnormal rotation Ask specialist to repair.
Dirty, clogged, damaged
Blowing air, cleaning, ask
specialist to repair.
Air-muffler Dirty, clogged Replace
Exhaust valve Dirty, clogged Blowing air, clean
Water separator
& silencer
Dirty, clogged Blowing air, cleaning
Electric source cable Deteriorated Replace
Upon start-up or during operation of DISL-503, it is normal that grease marks may be
found at the noted area.
Inlet
Outlet
Bearing
Possible grease marks