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Contents
Important information ................................................................................................................. 1
For safe operation ....................................................................................................................... 2
Contents ....................................................................................................................................... 7
1. Before use ................................................................................................................................ 8
1.1 Check the product ............................................................................................................. 8
2. Name and structure of each section ................................................................................... 10
3. Installation .............................................................................................................................. 11
3.1 Wiring ................................................................................................................................ 13
3.2 Test operation .................................................................................................................. 17
3.3 Connection to vacuum system (chamber) .................................................................... 19
4. Operation ................................................................................................................................ 20
4.1 Air-flush closed operation .............................................................................................. 22
4.1.1 Start-up ...................................................................................................................... 22
4.1.2 Shut-down .................................................................................................................. 22
4.2 Air-flush opened operation ............................................................................................. 23
4.2.1 Preparation ................................................................................................................ 23
4.2.2 Start-up and shut-down ............................................................................................ 24
4.2.3 When returning to air-flush closed operation ....................................................... 24
4.3 Water separator & silencer [Option] .............................................................................. 25
5. Maintenance and inspection ................................................................................................ 26
5.1 Daily maintenance and inspection ................................................................................ 26
5.2 Maintenance ..................................................................................................................... 27
6. Problems and remedies ........................................................................................................ 28
7. Disposal .................................................................................................................................. 28
8. Specifications ........................................................................................................................ 29
8.1 Specifications .................................................................................................................. 29
8.2 Dimensions ...................................................................................................................... 30
8.3 Performance data ............................................................................................................ 30
9. Warranty and After-sales service ........................................................................................ 32
9.1 Warranty ........................................................................................................................... 32
9.2 After-sales and service ................................................................................................... 32
Vacuum Pump Check Sheet For Repair ................................................................................. 33
Summary of Contents for DISL-503
Page 31: ...30 8 2 Dimensions 8 3 Performance data 60Hz 50Hz...
Page 32: ...31 Memo...
