CONTENTS
ii
7. Conclusion ······································································································· 19
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Warranties clause····························································································· 19
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Disposal Parts Material Table Exploded view ·····················································20.21
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Usage Status Check Sheet (For Instruction Manual)
(Please use when requesting overhaul)
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Sales,service agency,and the where to make contact
Drawing List
Fig. 2 -1 DAU-20 Appearance ····················································································· 3
Fig. 3 -1 Piping Example for Evacuation of Container ······················································ 5
Table 1 -1 Equipment Specifications ············································································ 1
Table 6 -1 Consumable Parts List ·············································································· 10
Table 6 -2 Inspection Positions and Guideline of Parts Replacement ································ 11
Table 6 -3 Trouble Check List ··················································································· 17
