Before use
01
Before use
We would like to express our sincere appreciation for purchasing ULVAC pump.
This pump is designed for evacuation exclusive use. Improper handling may cause failure and
trouble. Please read this Instruction Manual carefully and use the pump in paying attention to
inspection / maintenance / safety.
Operators of this pump
This pump shall be operated by those who have read this Instruction Manual and fully understood
caution in safety, specifications and operating method of this pump.
Perusal of Instruction Manual
Please read this Instruction Manual before using the pump correctly.
Always read "Directions to use safely" in particular.
Storage of Instruction Manual
Please keep Instruction Manual carefully.
After reading, store this Instruction Manual on the location where available for reading by operators.
Prohibited copying of Instruction Manual
Any portion of this Instruction Manual cannot be copied for use by the third party without ULVAC's
consent.
Observance of laws and ordinances
When disposing this pump, please handle by observing laws and the regulations that the local
government established.
Safety control in repair
When requesting ULVAC of repair, please inform us of usage status and presence of hazardous
substance in particular for safety control of repair personnel.
In case usage status is not clear, the repair / checking may not be accepted.