DAU-20 Instruction Manual
10
6-3 Periodic Inspection
Conduct periodic inspections of consumable parts in every 3,000 hours after started using and replace
parts according to "Guideline of Parts Replacement". Replacement method [6-4. refer to replacement]
of consumable part. In case there is no repair engineer, Ulvac Service Section shall be happy to
replace the parts.
Table 6 -1 Consumable Parts List
Part name
Quantity
Material
Reference life
Diaphragm
4
Main body: Synthetic
rubber
（
EPDM
）
Parts exposing to gas:
PTFE
6,000 hr
Valve
8
Fluorine Rubber
6,000 hr
Gas ballast cap
1
－
6,000 hr
Rubber leg
4
－
6,000 hr
L form coupling
2
PP
Different according to
working condition /
application
Gas ballast nipple
1
PP
Different according to
working condition /
application
Horse nipple
1
PP
Different according to
working condition /
application
L form nipple
1
PP
Different according to
working condition /
application
Bearing
1 set
―――
15,000 hr
These lives may differ according to the working conditions.
Lives may be extended by operating the pump with smaller load by observing "4-1 Caution in
Operation".
Operating the pump with smaller load means the operation at ultimate pressure (inlet port closed).
Bearings shall be replaced by Ulvac Service Section.
